2004
DOI: 10.1063/1.1644030
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Infrared spectroscopic analysis of an ordered Si/SiO2 interface

Abstract: Infrared spectroscopy is used to compare the Si/SiO2 interfaces created by thermal oxidation of a standard Si(100) substrate and of an ordered, (1×1) Si(100) substrate. The thermal oxides (approximately 25 Å) examined in this study are etched in dilute hydrofluoric acid and the resulting films analyzed spectroscopically. The behavior of the dominant optical phonon modes as a function of film thickness provides strong evidence that the ordered Si(100) substrate provides a template for an Si/SiO2 interface with … Show more

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Cited by 62 publications
(43 citation statements)
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“…There is observable oxidation of the silicon surface as evidenced by positive absorption modes at ∼1050 cm -1 and ∼1220 cm -1 , which correspond to the asymmetric Si-O-Si transverse optical (TO) and Si-O-Si longitudinal optical (LO) stretching modes, respectively. 71 The frequency of the LO mode indicates that the regions of oxide (SiO 2 ) are very small in physical size, 72,73 possibly including as few as 10 oxygen atoms. 74 This is consistent with scanning tunneling microscopy observations that oxidation of H-Si(111) surfaces occurs in randomly distributed 10-20 Å diameter domains.…”
Section: Resultsmentioning
confidence: 99%
“…There is observable oxidation of the silicon surface as evidenced by positive absorption modes at ∼1050 cm -1 and ∼1220 cm -1 , which correspond to the asymmetric Si-O-Si transverse optical (TO) and Si-O-Si longitudinal optical (LO) stretching modes, respectively. 71 The frequency of the LO mode indicates that the regions of oxide (SiO 2 ) are very small in physical size, 72,73 possibly including as few as 10 oxygen atoms. 74 This is consistent with scanning tunneling microscopy observations that oxidation of H-Si(111) surfaces occurs in randomly distributed 10-20 Å diameter domains.…”
Section: Resultsmentioning
confidence: 99%
“…The asymmetrical Si-O-Si stretch undergoes a phonon splitting between longitudinal optic (LO) and transverse optic (TO) components. It has been shown 122,123 that in a thin SiO 2 film, the TO vibrations are parallel to the film surface while the LO vibrations are perpendicular to it. Both components can be observed in GA-ATR; the band at 1230 cm -1 has been assigned to the LO mode, and the band at 1045 cm -1 to the corresponding TO mode.…”
Section: Vibrational Spectroscopies: Ir and Ramanmentioning
confidence: 99%
“…The films were produced by SiO evaporation and subsequent condensation on a Si(111) substrate hold at 300 K. Two broad features develop with growing film thickness. The stronger one at 983 cm −1 is assigned to the asymmetric stretching mode of the oxygen atom in a Si-O-Si bridge against the Si-neighbour atoms (Philipp 1971;Chabal et al 2002;Queeney et al 2004;Cachard et al 1971;Lehmann et al 1983Lehmann et al , 1984. The much weaker structure at approximately 715 cm −1 corresponds to the Si stretching mode, a mode with dominating Si displacement (Lehmann et al 1983), sometimes called "bending" mode in the literature.…”
Section: Resultsmentioning
confidence: 99%