“…When the film becomes thicker, hillock-like features grow along the h0001i direction on the first smooth layer. The hillock structures have been reported for ZnO or doped-ZnO by magnetron sputtering, 19 PLD9, MOCVD, 20 and vapor phase transport process. 21 The hillock density increases with increasing film thickness, i.e., 4.4%, 11.7% and 29.2% for 52 nm, 105 nm, and 210 nm thick films, respectively.…”