Influencia del substrato sobre las propiedades ferroeléctricas de láminas delgadas de PTCa

Jiménez, Ricardo; Poyato, Rosalı́a; Pardo, L.; Alemany, C.; Mendiola, J.

doi:10.3989/cyv.1999.v38.i5.937

Cited by 3 publications

References 11 publications

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Oriented growth of sol-gel-modified PbTiO3 thin films on Si-based substrates

González¹,

Poyato²,

Jiménez³

et al. 2000

Surf. Interface Anal.

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A sol–gel Pb0.76Ca0.24TiO3 solution was deposited by spin‐coating onto Pt/Ti/SiO2/Si(100), Ti/Pt/Ti/SiO2/ Si(100) and Pt/TiO2/SiO2/Si(100) substrates. As‐prepared substrates and those subjected to a thermal treatment in air at 650 °C for 1800 s were used. The wet films were dried at 350 °C for 60 s and crystallized in air by rapid thermal processing (RTP) at 650 °C for 50 s, with a heating rate of ∼30 °C s−1. This procedure was repeated four times to obtain crystalline films with a thickness of ∼250–300 nm. Perovskite films with different textures were obtained after crystallization. This texture was a consequence of the multilayer structure of the substrate. The formation of Pb0.76Ca0.24TiO3 films with a preferred orientation in the 〈 111〉 direction of the perovskite was observed when Ti was present at the top surface of the Pt. Texture of the films was studied by x‐ray diffraction (XRD) and the structure of the substrate surfaces was studied by grazing incidence x‐ray diffraction (GIXRD). Spontaneous pyroelectric coefficients were measured in the films. Copyright © 2000 John Wiley & Sons, Ltd.

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Oriented growth of sol-gel-modified PbTiO3 thin films on Si-based substrates

González¹,

Poyato²,

Jiménez³

et al. 2000

Surf. Interface Anal.

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Ferroelectric thin films of modified lead titanate

Mendiola

Calzada

2002

Handbook of Thin Films

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Effects of substrate annealing and post-crystallization thermal treatments on the functional properties of preferentially oriented (Pb,Ca)TiO3 thin films

Poyato

Calzada

Pardo

2003

Journal of Applied Physics

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〈111〉 and 〈001〉,〈100〉 preferentially oriented calcium-modified lead titanate thin films have been studied. Effects of the substrate annealing and post-crystallization thermal treatment of the films on the texture and ferro-, piezo-, and pyroelectric properties have been analyzed and discussed. The annealing of the substrate has effect on the texture of 〈001〉,〈100〉-oriented films and, as a consequence, produces an increase in the net polarization in the perpendicular direction to the plane of the film and in the pyroelectric coefficient. The annealing of the substrate does not affect the texture of 〈111〉-oriented films, but the electrical properties at the electrode–substrate interface and, as a consequence, gives place to high internal electric fields leading to the highest spontaneous piezo- (5 pm V−1) and pyroelectric coefficients (25.0×10−9 C cm−2 K−1). The asymmetry that characterizes the functional properties of 〈111〉-oriented films under poling with negative or positive polarity is also consequence of such a high internal field. This is accompanied with a remarkable field stability of the piezoelectric d33 coefficient when poling in the sense of the spontaneous polarization (d33∼45 pm V−1 under ±200 kV cm−1). The application of post-crystallization thermal treatment results in an enhancement of the ferroelectric and pyroelectric properties in all the films, by liberation of domains that were clamped by charged defects. Both the substrate and post-crystallization film annealing treatments lead to reach the highest values of remanent polarization (43 μC cm−2), pyroelectric coefficient (42.0×10−9 C cm−2 K−1), and figure of merit [13.3×10−6 (N m−2)−1/2] reported to date for sol-gel PTC films.

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Influencia del substrato sobre las propiedades ferroeléctricas de láminas delgadas de PTCa

Cited by 3 publications

References 11 publications

Oriented growth of sol-gel-modified PbTiO3 thin films on Si-based substrates

Oriented growth of sol-gel-modified PbTiO3 thin films on Si-based substrates

Ferroelectric thin films of modified lead titanate

Effects of substrate annealing and post-crystallization thermal treatments on the functional properties of preferentially oriented (Pb,Ca)TiO3 thin films

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