2013
DOI: 10.1016/j.surfcoat.2012.08.028
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Influences of preparation methods on bipolar switching properties in copper nitride films

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Cited by 12 publications
(5 citation statements)
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“…Hence the use of copper nitride in write-once memory devices [23,24,25,26,27], as a seed layer for electrodeposition [28] and in optical lithography for fabrication of metal links [29,30] was proposed. At the same time, bulk material is stable at room temperature, but decomposes at 300-450 • C. Other possible applications of Cu 3 N are related to spintronics [31,32], electrocatalysis [33], solar energy conversion [19,34], resistive switching memories [35,36] and inorganic-organic electronics [37].…”
Section: Introductionmentioning
confidence: 99%
“…Hence the use of copper nitride in write-once memory devices [23,24,25,26,27], as a seed layer for electrodeposition [28] and in optical lithography for fabrication of metal links [29,30] was proposed. At the same time, bulk material is stable at room temperature, but decomposes at 300-450 • C. Other possible applications of Cu 3 N are related to spintronics [31,32], electrocatalysis [33], solar energy conversion [19,34], resistive switching memories [35,36] and inorganic-organic electronics [37].…”
Section: Introductionmentioning
confidence: 99%
“…Second, a very small amount of Cu atoms is deposited directly on the substrate before it reacts with nitrogen in the vacuum chamber. In addition, other phases such as Cu 4 N may exist in the films [ 36 ], causing it to deviate from the stoichiometric ratio of 3:1. The corresponding EDS elemental mapping of the surface of the Cu 3 N films is shown in Figure 2 b.…”
Section: Resultsmentioning
confidence: 99%
“…TaN and TiN) electrodes that are generally applied in CMOS for commercial circuits [29]. Furthermore, nitridebased materials, such as AlN, Si 3 N 4 , NiN, and CoN, were reported exhibiting excellent resistive switching properties [30][31][32][33]. Among those nitride-based materials, aluminum nitride (AlN) with a wide band gap (approximately 6.2 eV) has attractive characteristics, including high thermal conductivity, high dielectric constant and good insulating properties [34][35][36].…”
Section: Introductionmentioning
confidence: 99%