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2004
DOI: 10.1117/12.535821
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Influence of writing strategy on CD control for the spatial-light-modulator-based Sigma7300 DUV laser pattern generator

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“…33 The thermolysis yields HF, whose p K a value (3.18) is significantly lower than the p K a value of HCF 3 SO 3 (−14). 34 We assume that at the temperatures (140–180 °C) applied in the stress relaxation experiments, the majority of the formed “super acids” have been converted to the lower acidic HF, which explains the superior catalysing performance of PDS-triflate.…”
Section: Resultsmentioning
confidence: 99%
“…33 The thermolysis yields HF, whose p K a value (3.18) is significantly lower than the p K a value of HCF 3 SO 3 (−14). 34 We assume that at the temperatures (140–180 °C) applied in the stress relaxation experiments, the majority of the formed “super acids” have been converted to the lower acidic HF, which explains the superior catalysing performance of PDS-triflate.…”
Section: Resultsmentioning
confidence: 99%