Influence of wavelength and pulse duration on the selective laser ablation of WOx, VOx and MoOx thin films.

Muñoz-García, Cristina; Canteli, D.; Lauzurica, S.; Morales, M.; Molpeceres, C.; Ros, Eloi; Ortega, Pablo; López-González, J.M.; Voz, C.

doi:10.1016/j.surfin.2021.101613

Cited by 7 publications

(5 citation statements)

References 33 publications

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“…Interestingly, low-level ablation off the Mo surface persists even if the fluence was reduced to 1 4 the ablation threshold (0.11 J/cm 2 ) of Mo [29]. For the photoformed MoO x , the average threshold is around 0.6 J/cm 2 for 8 ps pulses of 1064 nm [59], which is expected to decrease as the pulse duration decreases. This is because longer pulses have lower peak powers [60] and are associated with higher thermal diffusion, and deeper thermal propagation into the sample, therefore requiring relatively more energy than shorter pulses for ablation [59][60][61].…”

Section: Resultsmentioning

confidence: 97%

“…For the photoformed MoO x , the average threshold is around 0.6 J/cm 2 for 8 ps pulses of 1064 nm [59], which is expected to decrease as the pulse duration decreases. This is because longer pulses have lower peak powers [60] and are associated with higher thermal diffusion, and deeper thermal propagation into the sample, therefore requiring relatively more energy than shorter pulses for ablation [59][60][61]. Nonetheless, the ablation threshold is expected to change with each scan due to the laser-induced compositional, morphological, structural, and optical changes associated with each scan [47].…”

Section: Resultsmentioning

confidence: 97%

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A Two-Step Femtosecond Laser-Based Deposition of Robust Corrosion-Resistant Molybdenum Oxide Coating

et al. 2023

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A two-step femtosecond-pulsed laser deposition (fs-PLD) process is reported for the rapid development of uniform, poreless, crack-free, and well-adhering amorphous coatings of source materials with a high melting point. The first step comprises a high-rate raw deposition of the source material via fs-PLD, followed by a second step of scanning the raw sample with fs laser pulses of optimized fluence and scan parameters. The technique is applied to develop substoichiometric molybdenum oxide (MoOx, x < 3) coatings on mild steel. The thickness of the layer was ~4.25 μm with roughness around 0.27 μm. Comprehensive surface characterization reveals highly uniform and relatively moderate roughness coatings, implying the potential of these films as robust corrosion-resistant coats. Corrosion measurements in an aqueous NaCl environment revealed that the coated mild steel samples possess an average corrosion inhibition efficiency of around 95% relative to polished mild steel.

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Section: Resultsmentioning

confidence: 97%

Section: Resultsmentioning

confidence: 97%

A Two-Step Femtosecond Laser-Based Deposition of Robust Corrosion-Resistant Molybdenum Oxide Coating

et al. 2023

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“…The contour plot analysis played a crucial role in visually representing response cross sections (either MSE or RA) between two variables, E and tp. Specifically, a contour plot illustrated the relationship between the E (x-axis) and the fp (y-axis) in terms of two performance metrics: RA and MSE [33], as shown in Figure 5, where Figure 5a-c 11) and (12) indicated that E, fp, and E-fp interactions were statistically significant. We favor regions with high RA values in Figure 5a.…”

Section: Contour Plot Model For Exploring the Relationship Between Tp...mentioning

confidence: 99%

“…To ensure the high-quality scribe lines demanded by these applications, researchers have extensively studied the suitability of short pulse lasers, such as picosecond and nanosecond lasers, in laser scribing processes [11,12]. These lasers offer high precision and control, enabling researchers to explore the relationship between pulse energy, pulse duration, and scribing outcomes [13,14].…”

Section: Introductionmentioning

confidence: 99%

An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles

Chen,

Chang,

Lei

2023

Micromachines

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This article presents a novel approach for evaluating laser scribing quality through cross-section profiles generated from a three-dimensional optical profiler. Existing methods for assessing scribing quality only consider the width and depth of a scribe profile. The proposed method uses a cubic spline model for cross-section profiles. Two quality characteristics are proposed to assess scribing accuracy and consistency. Accuracy is measured by the ratio of the actual laser-scribed area to the target area (RA), which reflects the deviation from the desired profile. The mean square error (MSE) is a measure of how close each scribed cross-section under the same scribing conditions is to the fitted cubic spline model. Over 1370 cross-section profiles were generated under 171 scribing conditions. Two response surface polynomial models for RA and MSE were built with 18 scribing conditions with acceptable scribing depth and RA values. Both RA and MSE were considered simultaneously via contour plots. A scatter plot of RA and MSE was then used for Pareto optimization. It was found that the cross-sectional profile of a laser scribe could be accurately represented by a cubic spline model. A multivariate nonlinear regression model for RA and MSE identified pulse energy and repetition rate as the two dominant laser parameters. A Pareto optimization analysis further established a Pareto front, where the best compromised solution could be found.

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“…Pulsed laser ablation methods exploit well-controlled light-matter interactions for surface patterning 24 , with various demonstrated uses in manufacturing 25 . The accuracy and precision of lateral patterning and thickness reduction depend not only on the properties of the materials but on key laser parameters, especially pulse duration and wavelength 26 . Ultrashort pulsed lasers (less than 10 ps) are advantageous because the ablation process occurs on timescales sufficiently short to limit thermal diffusion and the associated spread of the heat-affected zone 27 – 29 .…”

Section: Introductionmentioning

confidence: 99%

High-speed, scanned laser structuring of multi-layered eco/bioresorbable materials for advanced electronic systems

Yang

Seo

et al. 2022

Nat Commun

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Physically transient forms of electronics enable unique classes of technologies, ranging from biomedical implants that disappear through processes of bioresorption after serving a clinical need to internet-of-things devices that harmlessly dissolve into the environment following a relevant period of use. Here, we develop a sustainable manufacturing pathway, based on ultrafast pulsed laser ablation, that can support high-volume, cost-effective manipulation of a diverse collection of organic and inorganic materials, each designed to degrade by hydrolysis or enzymatic activity, into patterned, multi-layered architectures with high resolution and accurate overlay registration. The technology can operate in patterning, thinning and/or cutting modes with (ultra)thin eco/bioresorbable materials of different types of semiconductors, dielectrics, and conductors on flexible substrates. Component-level demonstrations span passive and active devices, including diodes and field-effect transistors. Patterning these devices into interconnected layouts yields functional systems, as illustrated in examples that range from wireless implants as monitors of neural and cardiac activity, to thermal probes of microvascular flow, and multi-electrode arrays for biopotential sensing. These advances create important processing options for eco/bioresorbable materials and associated electronic systems, with immediate applicability across nearly all types of bioelectronic studies.

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Influence of wavelength and pulse duration on the selective laser ablation of WOx, VOx and MoOx thin films.

Cited by 7 publications

References 33 publications

A Two-Step Femtosecond Laser-Based Deposition of Robust Corrosion-Resistant Molybdenum Oxide Coating

A Two-Step Femtosecond Laser-Based Deposition of Robust Corrosion-Resistant Molybdenum Oxide Coating

An Exploratory Study of Laser Scribing Quality through Cross-Section Scribing Profiles

High-speed, scanned laser structuring of multi-layered eco/bioresorbable materials for advanced electronic systems

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