2019
DOI: 10.3788/lop56.011405
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Influence of Water Jet Assisted Laser Processing Silicon Carbide

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“…They can wash away laser processing products and absorb excess heat, effectively improving the surface quality of difficult-to-machine materials. According to the pressure of the water jet, they can be divided into low-pressure water jets and high-pressure water jets [52][53][54]. Wang et al [55] used water-jet-assisted laser machining silicon nitride to study the effects of laser energy, water-jet pressure, and laser moving speed on groove depth and surface microtopography.…”
Section: Water-jet-assisted Laser Processingmentioning
confidence: 99%
“…They can wash away laser processing products and absorb excess heat, effectively improving the surface quality of difficult-to-machine materials. According to the pressure of the water jet, they can be divided into low-pressure water jets and high-pressure water jets [52][53][54]. Wang et al [55] used water-jet-assisted laser machining silicon nitride to study the effects of laser energy, water-jet pressure, and laser moving speed on groove depth and surface microtopography.…”
Section: Water-jet-assisted Laser Processingmentioning
confidence: 99%