2013
DOI: 10.1063/1.4819967
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Influence of transfer residue on the optical properties of chemical vapor deposited graphene investigated through spectroscopic ellipsometry

Abstract: In this study, we have examined the effects of transfer residue and sample annealing on the optical properties of chemical vapor deposited graphene, transferred onto a sapphire substrate. The optical absorption of graphene was obtained from point-by-point inversion of spectroscopic ellipsometry measurements in the visible and ultraviolet ranges (250–800 nm). Measured spectra were analyzed by optical models based on the Fresnel coefficient equations. The optical models were supported by correlated Raman, scanni… Show more

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Cited by 40 publications
(35 citation statements)
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References 45 publications
(46 reference statements)
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“…7 and ESI †). Comparing these results with the others previously reported, 16,18,28 it is evident that although a better agreement can be achieved in the near UV region, it fails in the visible range. Therefore, a variable graphene thickness would not be the reason for the inappropriate n, k values obtained after data analyses using the sample structure proposed in Fig.…”
Section: Optical Propertiessupporting
confidence: 82%
“…7 and ESI †). Comparing these results with the others previously reported, 16,18,28 it is evident that although a better agreement can be achieved in the near UV region, it fails in the visible range. Therefore, a variable graphene thickness would not be the reason for the inappropriate n, k values obtained after data analyses using the sample structure proposed in Fig.…”
Section: Optical Propertiessupporting
confidence: 82%
“…The same researchers have performed ellipsometry in situ to study the evolution of processes on fixed substrates, such as the drying of deposited very thin graphene films [101], using a Sopra GES5E-IRSE (Sopra SAS, Avenue de l’Europe, 92400, Courbevoie, France). Similar ellipsometers with a reaction chamber for in situ monitoring of surface processes on the laboratory scale are manufactured by Sentech (SE 400adv) (SENTECH Instruments GmbH, Berlin, Germany) and Horiba (Uvisel In-Situ) (HORIBA UK Limited, 2 Dalston Gardens, Stanmore Middlesex HA7 1BQ, UK).…”
Section: Thickness Monitoringmentioning
confidence: 99%
“…Graphene layer transfer often involves the use of polymer support, typically polymethylmethacrylate (PMMA), which is challenging to subsequently remove from the graphene. [34][35][36][37][38][39][40][41][42] Similar residues arise from lithographic patterning of graphene using resist layers. [43][44][45] Technologically relevant, large area CVD graphene is polycrystalline with a range of inherent defects, and upon transfer mono-and few-layer graphene tends to wrinkle.…”
mentioning
confidence: 98%