Influence of titanium-substrate roughness on Ca–P–O thin films grown by atomic layer deposition

Sagari, A.R. Ananda; Malm, Jari; Laitinen, Mikko; Rahkila, Paavo; Ma, Hongqiang; Putkonen, Matti; Karppinen, Maarit; Whitlow, Harry J.; Sajavaara, Timo

doi:10.1016/j.tsf.2012.11.137

Cited by 6 publications

(1 citation statement)

References 28 publications

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“…1 This comes at the expense of very slow growth (typically in the order of 1 Å /cycle), making ALD most suitable for very thin films. Although many different ALD processes have been developed for various classes of materials such as oxides, ii-vi and iii-v semiconductors, metal nitrides, metals, metal sulfides, and fluorides, 2 the existing reports on ALD of phosphates are still limited, [3][4][5][6][7][8][9][10][11][12][13] but have recently been increasing in number because of their relevance as electrode [14][15][16][17][18] or electrolyte [19][20][21][22] films in lithium-ion batteries.…”

Section: Introductionmentioning

confidence: 99%

Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material

Dobbelaere

Mattelaer

Vereecken

et al. 2017

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Vanadium phosphate films were deposited by a new process consisting of sequential exposures to trimethyl phosphate (TMP) plasma, O 2 plasma, and either vanadium oxytriisopropoxide [VTIP, OV(O-i-Pr) 3 ] or tetrakisethylmethylamido vanadium [TEMAV, V(NEtMe) 4 ] as the vanadium precursor. At a substrate temperature of 300 C, the decomposition behavior of these precursors could not be neglected; while VTIP decomposed and thus yielded a plasma-enhanced chemical vapor deposition process, the author found that the decomposition of the TEMAV precursor was inhibited by the preceding TMP plasma/O 2 plasma exposures. The TEMAV process showed linear growth, saturating behavior, and yielded uniform and smooth films; as such, it was regarded as a plasma-enhanced atomic layer deposition process. The resulting films had an elastic recoil detection-measured stoichiometry of V 1.1 PO 4.3 with 3% hydrogen and no detectable carbon contamination. They could be electrochemically lithiated and showed desirable properties as lithiumion battery electrodes in the potential region between 1.4 and 3.6 V versus Li þ /Li, including low capacity fading and an excellent rate capability. In a wider potential region, they showed a remarkably high capacity (equivalent to three lithium ions per vanadium atom), at the expense of reduced cyclability. V

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