Influence of the power on the particles generated in a low pressure radio frequency nitrogen-rich methane discharge

Massereau-Guilbaud, Véronique; Pereira, Jérémy; Géraud-Grenier, Isabelle; Plain, A.

doi:10.1063/1.3072664

Cited by 19 publications

(14 citation statements)

References 36 publications

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“…RF hydrocarbon plasmas are known to be a suitable medium for the production of carbon spheres with nanometric sizes [13]. Submicron size particles formed in the bulk of the RF plasma are collected after falling on the ground electrode orblueor the chamber floor.…”

Section: Resultsmentioning

confidence: 99%

Sub-micron size carbon structures synthesized using plasma enhanced CVD, without external heating and no catalyzer action

Valderrama

Favre

Bhuyan

et al. 2010

Surface and Coatings Technology

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Section: Resultsmentioning

confidence: 99%

Sub-micron size carbon structures synthesized using plasma enhanced CVD, without external heating and no catalyzer action

Valderrama

Favre

Bhuyan

et al. 2010

Surface and Coatings Technology

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“…The time evolution of the fundamental frequency and harmonics of the current was followed with the intention to probe the formation of very small-less than 5 nm-particles in the plasma [34,35]. Measuring the self-bias and floating potentials in radio-frequency (RF) discharges can provide additional information on the dynamical behaviour of dusty plasmas, indicating the tendency to a more electronegative plasma state in the presence of dust [20,22,33]. Measurements of the mean electron energy and electron density were achieved with Langmuir probes, which completes the understanding of the effects of dust particles on the electron energy probability function (EEPF) in these plasmas [7,36].…”

Section: Introductionmentioning

confidence: 99%

Multi-scale investigation in the frequency domain of Ar/HMDSO dusty plasma with pulsed injection of HMDSO

Garofano

Berard

Boivin

et al. 2019

Plasma Sources Sci. Technol.

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A combination of time-resolved optical emission spectroscopy measurements and collisionalradiative modeling is used to investigate the phenomena occurring over multiple time scales in the frequency domain of a low-pressure, axially asymmetric, capacitively coupled radiofrequency (RF) argon plasma with pulsed injection of hexamethyldisiloxane (HMDSO, Si 2 O(CH 3) 6). The collisional-radiative model developed here considers the population of argon 1s and all ten 2p levels (in Paschen's notation). The presence of HMDSO in the plasma is accounted for in the model by quenching of the argon 1s states by species generated by plasma processing of HMDSO, including HMDSO-15 (Si 2 O(CH 3) 5), acetylene (C 2 H 2) and methane (CH 4). Detailed analysis of the relative populations of Ar 2p states reveals cyclic evolutions of the electron temperature, electron density and quenching frequency that are shown to be linked to the kinetics of dust formation in Ar/HMDSO plasmas. Penning ionization of HMDSO and its fragments is found to be an important source of electrons for the plasma maintenance. It is at the origin of the cyclic formation/disappearance of the dust cloud, without attenuation of the phenomenon, as long as the pulsed injection of HMDSO is sustained. The multi-scale approach used in this study further reveals the straightforward relation of the frequency of HMDSO pulsed injection, in particular the HMDSO duty cycle, with the frequency of dust formation/ disappearance cycle.

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“…Dust particles can be grown inside a plasma by gas phase reactions [1][2][3] that lead to high densities of submicron dust particles. These particles acquire a negative charge and when the global charge they represent is no more negligible compared with the electron density, a wide variety of low frequency instabilities are observed.…”

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confidence: 99%

Carousel Instability in a Capacitively Coupled RF Dusty Plasma

Mikikian

Couëdel

Tessier

et al. 2011

IEEE Trans. Plasma Sci.

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Copyright 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. This article is available at http://dx.doi.org/10.1109/TPS.2011.2155675International audienceRotating plasma spheroids are observed in a capacitively coupled radio-frequency discharge containing grown dust particles. These plasma spheroids are regions of slightly enhanced emission that rotate along the circumference of electrodes. This effect is not observed systematically, and when it occurs, the number and the speed of the spheroids can vary with the discharge parameters. These spheroids have been evidenced by using high-speed imaging

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Influence of the power on the particles generated in a low pressure radio frequency nitrogen-rich methane discharge

Cited by 19 publications

References 36 publications

Sub-micron size carbon structures synthesized using plasma enhanced CVD, without external heating and no catalyzer action

Sub-micron size carbon structures synthesized using plasma enhanced CVD, without external heating and no catalyzer action

Multi-scale investigation in the frequency domain of Ar/HMDSO dusty plasma with pulsed injection of HMDSO

Carousel Instability in a Capacitively Coupled RF Dusty Plasma

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