Influence of the Oxygen Partial Pressure on the Composition and Optical Properties of Electron-beam Evaporated TiOx Films

Jiang, Jinchun; Li, B.; Zhang, Z.Q.; Hu, Po; Zhang, F.S.; Huansheng, Cheng; Yang, F.

doi:10.1002/1521-396x(200209)193:1<69::aid-pssa69>3.0.co;2-4

Cited by 3 publications

(1 citation statement)

References 9 publications

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“…Indeed, the refractive index is known to correlate with TiO 2 density which increases with oxygen deficiency [45,46]. The absorption index k was found to be lower (0.00639) for titania deposited using the nozzle compared to the ordinary one (0.00917) in the frame of the optical model (see Figure 5b), which supports the suggested difference in the oxygen stoichiometry sample [47][48][49][50]. In sum, the nozzle attachment increased the homogeneous area of titania films from 3 cm 2 to more than 12 cm 2 and allowed to strongly decrease the reactive gas consumption.…”

Section: Depositionsupporting

confidence: 66%

A Coaxial Nozzle Attachment Improving the Homogeneity of the Gas Flow Sputtering

Alktash,

Körner,

Liu

et al. 2024

Coatings

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The Hollow Cathode Gas Flow Sputtering (GFS) provides special plasma conditions and is of extensive interest as a more affordable alternative to the high vacuum sputtering techniques. In the case of the tubular cathode a circular outlet symmetry stipulates homogeneity issues for both metallic and reactive deposition regimes. Using the results of Direct Simulation Monte Carlo (DSMC), we propose an external coaxial attachment which is manufactured and examined in a nozzle and a diffuser positioning. The impact on the homogeneity of Ti and TiO2 films is examined using profilometry and spectral ellipsometry. Our results demonstrate that the use of the nozzle attachment significantly enhances film homogeneity from about 3 cm2 to more than 12 cm2. It also secures better process control in terms of oxygen stoichiometry and film thickness. Some crucial general issues of the reactive GFS process are discussed.

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Section: Depositionsupporting

confidence: 66%

A Coaxial Nozzle Attachment Improving the Homogeneity of the Gas Flow Sputtering

Alktash,

Körner,

Liu

et al. 2024

Coatings

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Plasmonic effect of diffused Ag nanoparticles in EB evaporated Ag/TiO2 bilayer thin films and role of oxygen pressure

Haque

Tripathi

et al. 2020

Journal of Alloys and Compounds

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Monolithic organic-oxide microcavities fabricated by low-temperature electron-beam evaporation

Persano

Cingolani

Pisignano

2005

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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We report on monolithic symmetric vertical microcavities formed by depositing dielectric-distributed Bragg reflectors (DBRs) by reactive electron-beam evaporation at low temperature (T). The DBRs consist of alternating TiOx and SiOx layers with a refractive index contrast of about 0.55 in the visible range. The DBRs, consisting of a very few index-contrast pairs, exhibit high peak reflectivity (93%) around 590nm with a full width at half maximum of about 160nm. The excellent compatibility of thin low-T reactive electron-beam evaporated films with a thicker cavity medium comprised of molecular organic compound, and prepared either in a single growth-run, or ex situ, opens the way for novel symmetric vertical-emitting resonators and monolithic photo- and electroluminescent microcavities.

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Influence of the Oxygen Partial Pressure on the Composition and Optical Properties of Electron-beam Evaporated TiOx Films

Cited by 3 publications

References 9 publications

A Coaxial Nozzle Attachment Improving the Homogeneity of the Gas Flow Sputtering

A Coaxial Nozzle Attachment Improving the Homogeneity of the Gas Flow Sputtering

Plasmonic effect of diffused Ag nanoparticles in EB evaporated Ag/TiO2 bilayer thin films and role of oxygen pressure

Monolithic organic-oxide microcavities fabricated by low-temperature electron-beam evaporation

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