Abstract:New conductor pastes for AlN as substrate material with fired films of a sheet resistance below 25 mOhm/sq were investigated. The pastes consist of AgPd as conductive phase for leach resistance. Other paste ingredients are glasses of matched composition for adhesion and densification properties, little amounts of inorganic additives and organic vehicles for film deposition. The latter has a significant influence on the paste deposition and the resulting film properties as well. In order to shine light into the… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.