2020
DOI: 10.1002/pssb.202000464
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Influence of the Growth Substrate on the Internal Quantum Efficiency of AlGaN/AlN Multiple Quantum Wells Governed by Carrier Localization

Abstract: The influence of the growth substrate on the internal quantum efficiency (IQE) of deep ultraviolet light‐emitting diodes is studied. Two nominally identical Al‐rich AlGaN/AlN multi‐quantum‐well (MQW) structures grown by metal–organic vapor phase epitaxy (MOVPE) on different substrates are investigated. The first MQW structure is grown on a native AlN substrate, whereas the second one is deposited on an AlN template on sapphire. By the combination of atomic force microscopy (AFM), photoluminescence (PL), and ca… Show more

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“…[ 27 ] Growth on native AlN substrates has been show to improve the growth of Al‐rich AlGaN layers. [ 28 ] Growth on large surface off‐cut sapphire substrates have also been demonstrated to improve the quality of the growth of AlGaN layers. [ 29 ] Epitaxial lateral overgrowth can further reduce the dislocation density in GaN layers.…”
Section: Introductionmentioning
confidence: 99%
“…[ 27 ] Growth on native AlN substrates has been show to improve the growth of Al‐rich AlGaN layers. [ 28 ] Growth on large surface off‐cut sapphire substrates have also been demonstrated to improve the quality of the growth of AlGaN layers. [ 29 ] Epitaxial lateral overgrowth can further reduce the dislocation density in GaN layers.…”
Section: Introductionmentioning
confidence: 99%