2023
DOI: 10.1016/j.vacuum.2022.111634
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Influence of the argon ratio on the structure and properties of thin films prepared using PECVD in TMSAc/Ar mixtures

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Cited by 6 publications
(4 citation statements)
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“…In addition to the materials described above, plasma-deposited allylamine enhanced the adhesion of functional proteins onto ceramic dental implants [50], thereby demonstrating the wide range of materials that can be treated with such an approach. However, it remains necessary to control the pertinent plasma parameters for each system in order to optimize the coating performance [41,[53][54][55].…”
Section: Deposition Of Biocompatible and Adhesive Coatingsmentioning
confidence: 99%
See 1 more Smart Citation
“…In addition to the materials described above, plasma-deposited allylamine enhanced the adhesion of functional proteins onto ceramic dental implants [50], thereby demonstrating the wide range of materials that can be treated with such an approach. However, it remains necessary to control the pertinent plasma parameters for each system in order to optimize the coating performance [41,[53][54][55].…”
Section: Deposition Of Biocompatible and Adhesive Coatingsmentioning
confidence: 99%
“…From the earlier coatings of simple antifouling fluorocarbons [56], plasma deposition has now evolved to embrace more complex Zwitterionic antifouling layers [57]. Bio-compatible layers can now be prepared from materials such as organosilicons [55], and plasma processing is a key step in the manufacture of blood-compatible coatings [58]. The development of barrier coatings for a range of medical and non-medical applications is a growing area [59].…”
Section: Deposition Of Biocompatible and Adhesive Coatingsmentioning
confidence: 99%
“…In addition to reactive species densities, monomer densities affect the properties of the plasma-synthesized polymer films. In the case of a low-pressure argon discharge supplied with a monomer vapor of trimethylsilyl acetylene (TMSAc), an increase in TMSAc density from 1.7 to 6.5 sccm results in the formation of SiOXHYCZ films enriched with larger amounts of carbon, the promotion of Si-O bonds rather than Si-C bonds and WCA values increasing from 85.5° to 96.5° [127] . In a parallel example, increasing densities of allylamine monomer within a helium discharge modify the nitrogen incorporation in the resulting plasma-polymerized films [66] .…”
Section: Chemical Species Densities In the Gaseous Phasementioning
confidence: 99%
“…Trimethylsilyl acetate [127] Silanes especially tetramethylsilane (TMS) [286] , hexamethyldisilazane (HMDSN) [287] Siloxanes especially hexamethyldisiloxane (HMDSO) [288] and octamethylcyclotetrasiloxane (OMCTS) [289] Large organic molecules or oligomers Perfluorocarbon precursors, e.g., perfluorohexane (PFH, C6F14) [290] , perfluorodecalin (PFD, C10F18) [291] , perfluoroheptane (PFHp, C7F16) [292] Ethylene glycol [293] , tetra(ethylene glycol) dimethyl ether [294] ; Diethylene glycol vinyl ether [295] , Diethylene glycol monomethyl ether [296] ; ε-caprolactone [296] ; Perfluorodecyl acrylate [295] The precursor molecules in the plasma phase can generate active species (free radicals, reactive species, etc.) through gaseous reactions such as dissociation, ionization and excitation.…”
Section: Organosilicon Compoundsmentioning
confidence: 99%