Abstract:Micromechanical resonators (MEMS resonators) often show a discrepancy between the frequencytemperature (f-T) characteristics they have in open-loop and closed-loop measurements. We show that this discrepancy is due to the nonlinear amplitude-frequency (A-f) effect: the quality factor (Q) can increase by more than a factor of 2 when the resonators go from a high temperature to a low temperature; simple oscillators thus allow the resonator amplitude to change with temperature; then, the A-f effect becomes temper… Show more
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