1994
DOI: 10.1143/jjap.33.4727
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Influence of Surface Roughness on Secondary Electron Emission and Electron Backscattering from Metal Surface

Abstract: A high quality factor (Q-factor) is most desirable for resonant mass sensors because their sensitivity greatly depends on the detectable frequency shift after mass adsorption. The authors fabricated lead zirconate titanate (PZT) thin film transduced micro cantilevers and studied the energy dissipation mechanisms to better understand the essential aspects affecting the Qfactor. It was found that energy dissipation induced by the multi-layered device structure and the PZT thin film was noteworthy even under atmo… Show more

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Cited by 24 publications
(18 citation statements)
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“…A maximum of the SEY δ max ≈ 2 around 300 eV is typically found for flat copper [33], and the only partial coverage of the surface treated in Ar induces an intermediate SEY reduction (δ max ≈ 1.3) with a moderate shift of the peak to a higher energy at around 500 eV. For the samples treated in air or N 2 , the more complete nanoparticle coverage allows for a much more efficient SEY reduction, with the peak potentially being shifted to energies above our maximum experimental value [34].…”
Section: Discussionmentioning
confidence: 48%
“…A maximum of the SEY δ max ≈ 2 around 300 eV is typically found for flat copper [33], and the only partial coverage of the surface treated in Ar induces an intermediate SEY reduction (δ max ≈ 1.3) with a moderate shift of the peak to a higher energy at around 500 eV. For the samples treated in air or N 2 , the more complete nanoparticle coverage allows for a much more efficient SEY reduction, with the peak potentially being shifted to energies above our maximum experimental value [34].…”
Section: Discussionmentioning
confidence: 48%
“…In contrast, surface structures with curvature radii from nanometers to sub-microns may have a strong effect on SEE. It is also reasonable to mention that the SEE yield from the surface with distributed structures of low concentration is proportional to the concentration of the structures [29,30] and greater than the SEE yield from the smooth surface as long as 0.01 a/L 1, here L is a distance between structural elements [19].…”
Section: Discussionmentioning
confidence: 99%
“…when the distance between structural elements is much larger than their size. This excludes the effect of re-entrance of emitted electrons into another part of the surface since the probability of this process becomes very small [19]. To describe SEE due to isotropic incidence of primary electrons e − p of energy E 0 to the objects with varying surface curvature k we generalize a commonly used expression [3,6,11] for the electron yield as…”
Section: Modelmentioning
confidence: 99%
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“…The effect of surface roughness is simulated by [27], where it is to see that the SEY and the backscattering coefficient varies according to the height and width of the roughness. …”
Section: Influence Of the Surface Roughness On The Seymentioning
confidence: 99%