Influence of surface modification on the quality factor of microresonators

Ergincan, O.; Palasantzas, G.; Kooi, Bart J.

doi:10.1103/physrevb.85.205420

Cited by 25 publications

(22 citation statements)

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“…In general, the vibrational frequencies of NEMS are dependent on surface effects [181][182][183]. For example, the surface modification may result in an undesirable decrease in the Q-factor [181] that is directly related to the detection limit [182,184] as shown in Eq. (14).…”

Section: Perspectives and Challengesmentioning

confidence: 99%

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

et al. 2011

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Recent advances in nanotechnology have led to the development of nano-electro-mechanical systems (NEMS) such as nanomechanical resonators, which have recently received significant attention from the scientific community. This has not only been for their capability for the label-free detection of bio/chemical-molecules at single-molecule (or atomic) resolution for future applications such as the early diagnostics of diseases such as cancer, but also for their unprecedented ability to detect physical quantities such as molecular weight, elastic stiffness, surface stress, and surface elastic stiffness for adsorbed molecules on the surface. Most experimental works on resonator-based molecular detection have been based on the principle that molecular adsorption onto a resonator surface increases the effective mass, and consequently decreases the resonant frequencies of the nanomechanical resonator. However, this principle is insufficient to provide fundamental insights into resonator-based molecular detection at the nanoscale; this is due to recently proposed novel nanoscale detection principles including various effects such as surface effects, nonlinear oscillations, coupled resonance, and stiffness effects. Furthermore, these effects have only recently been incorporated into existing physical models for resonators, and therefore the universal physical principles governing nanoresonator-based detection have not been completely described. Therefore, our objective in this review is to overview the current attempts to understand the underlying mechanisms in nanoresonator-based detection using physical models coupled to computational simulations and/or experiments. Specifically, we will focus on issues of special relevance to the dynamic behavior of nanoresonators and their applications in biological/chemical detection: the resonance behavior of micro/nano-resonators; resonator-based chemical/biological detection; physical models of various nanoresonators such as nanowires, carbon nanotubes, and graphene. We pay particular attention to experimental and computational approaches that have been useful in elucidating the mechanisms underlying the dynamic behavior of resonators across multiple and disparate spatial/length scales, and the resulting insight into resonator-based detection that has been obtained. We additionally provide extensive discussion regarding potentially fruitful future research directions coupling experiments and simulations in order to develop a fundamental understanding of the basic physical principles that govern NEMS and NEMS-based sensing and detection applications.

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Section: Perspectives and Challengesmentioning

confidence: 99%

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

et al. 2011

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“…[15]. Ergincan et al [16] have performed a systematic study on the dependence of Q-factor on the surface of commercial MCs at various gas pressures, covering the entire range from the free molecular up to continuous regime (ambient pressures ∼1 atm). They have shown that, in the molecular regime Q scales with pressure P as 1/P, while in continuous regime the scaling changes to ∼1/ √ P. In the present work, we have studied the desorption kinetics of water molecules on an uncoated Si MC with a native grown SiO 2 layer, in dynamic mode.…”

Section: Introductionmentioning

confidence: 99%

Role of surface morphology on desorption kinetics of water molecules from uncoated silicon microcantilever

Raghuramaiah

Prabakar

Sundari

et al. 2016

Sensors and Actuators B: Chemical

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“…19 but for cantilevers with systematically modified surfaces. 20 At higher pressures, within the molecular regime, Q showed the typical inverse linear dependence on pressure Q $ P À1 . 19 However, in the molecular regime the Q factor also showed a strong dependence on surface morphology as indicated by surface areas calculations using measured roughness data obtained by atomic force microscopy (AFM), and compared to those obtained from Q $ P À1 plots.…”

mentioning

confidence: 98%

“…19 However, in the molecular regime the Q factor also showed a strong dependence on surface morphology as indicated by surface areas calculations using measured roughness data obtained by atomic force microscopy (AFM), and compared to those obtained from Q $ P À1 plots. 20 However, so far a detailed systematic experimental study of the influence of surface area on the Q factor of resonators within the continuum regime, where dissipation is the highest, is still missing. Hence, this will be the topic of the present paper, where we explore the dependence of the Q factor on the surface area of commercial microcantilevers ( Fig.…”

mentioning

confidence: 99%

“…19 The effect of local roughness and surface area in this regime has been recently explored and good agreement was found between results obtained from Q $ P À1 plots and direct surface area calculations from AFM analysis. 20 The third regime is the transition where a crossover from the non-Newtonian molecular regime to continuum or dense flow regime occurs. The Newtonian approximation, the basis for the Navier-Stokes equations, breaks down when the particulate nature of the fluid becomes significant to the flow.…”

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confidence: 99%

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