Influence of substrate temperature on the properties of vacuum evaporated InSb films

Abstract

Indium Antimonide (InSb) thin films were grown onto well cleaned glass substrates at different substrate temperatures (303, 373 and 473 K) by vacuum evaporation. The elemental composition of the deposited InSb film was found to be 52.9 % (In) and 47.1 % (Sb). X-ray diffraction studies confirm the polycrystallinity of the films and the films show preferential orientation along the (111) plane. The particle size (D), dislocation density (δ) and strain (ε) were evaluated. The particle size increases with the increase of substrate temperature, which was found to be in the range from 22.36 to 32.59 nm. In Laser Raman study, the presence of longitudinal mode (LO) confirms that the deposited films were having the crystalline nature. Raman peak located at 191.26 cm -1 shift towards the lower frequencies and narrows with increase in deposition temperature. This indicates that the crystallinity is improved in the films deposited at higher substrate temperatures. Hall measurements indicate that the films were p-type, having carrier concentration ≅ 10 16 cm -3and mobility (4 -7.7) ×10 3 cm 2 /Vs. It is observed that the carrier concentration (N) decreases and the Hall mobility (µ) increases with the increase of substrate temperature.

Structure, microstructure and corrosion properties of brush-plated Cu–Ni alloy

“…where b is the FWHM of (111) peak, D is crystalline size, and n is a factor, which is unity for thin film [15]. The calculated value of the strain and the dislocation densities are 3.7 9 10 -2 , 3.8 9 10 -4 .…”

“…The double layer capacitance C dl value is obtained from the frequency at which Z imaginary is maximum [15] X Z im ð Þ max…”

Effect of substrate temperature on the properties of reactively sputtered TiN/NbN multilayers

“…The TiN/NbN multilayer coatings exhibited the characteristic peaks centered at 180, 210 and 560 cm optical phonon band shifts to higher frequencies. The presence of longitudinal optical (LO) phonon modes confirms that the deposited coatings are crystalline in nature [36]. Photoluminescence measurements are carried out at room temperature to study the luminescent properties of thin films.…”

Effect of substrate temperature on the structural properties of magnetron sputtered titanium nitride thin films with brush plated nickel interlayer on mild steel

“…Since dislocation density and strain are the manifestation of dislocation network in the films, the decrease in dislocation density indicates the formation of highquality films at higher substrate temperatures. This becomes possible due to the fact that when the substrate is kept at higher temperature, the dislocations get more thermal energy and have a higher mobility [21].…”