2016
DOI: 10.1002/sia.6035
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Influence of substrate nature on the growth of copper oxide thin films

Abstract: Cu thin films were deposited on Si(111), glass, and quartz substrates by magnetron sputtering. X-ray diffraction, SEM, and photoemission electron microscope studies were carried out to characterize the films. An influence of the nature of substrate on the Cu 2 O and CuO phases formed was observed. Copper silicide formation in case of silicon substrates aided in formation of Cu 2 O rather than CuO unlike glass and quartz substrates. Formation of nanocrystallites was observed by SEM and X-ray diffraction.

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Cited by 9 publications
(1 citation statement)
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“…All samples show the diffraction peaks characteristic to cellulose Iβ 9 , 47 . A small shoulder coming from the Si (111) planes of the substrate 48 was also observed. The XRD crystallinity ( X C ), calculated as a ratio between the areas under the crystalline peaks and under the crystalline and amorphous peaks, did not significantly change after the plasma treatments (Table 3 ), showing that the crystalline structure is not altered by SLP, regardless the conditions.…”
Section: Resultsmentioning
confidence: 86%
“…All samples show the diffraction peaks characteristic to cellulose Iβ 9 , 47 . A small shoulder coming from the Si (111) planes of the substrate 48 was also observed. The XRD crystallinity ( X C ), calculated as a ratio between the areas under the crystalline peaks and under the crystalline and amorphous peaks, did not significantly change after the plasma treatments (Table 3 ), showing that the crystalline structure is not altered by SLP, regardless the conditions.…”
Section: Resultsmentioning
confidence: 86%