Influence of substrate bias voltage on structure and properties of the CrAlN films deposited by unbalanced magnetron sputtering

Lv, Yanhong; Li, Ji; Liu, Xiaohong; Li, Hongxuan; Zhou, Hang; Chen, Jianmin

doi:10.1016/j.apsusc.2011.12.048

Cited by 100 publications

(31 citation statements)

References 35 publications

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“…This occurred despite the same chemical composition and phase microstructure of the outer CrAlN layer. We are in agreement with Lv et al [13] and believe that the different electrochemical behavior of our multilayer may be associated with their different surface defect densities. …”

Section: Sem Investigationssupporting

confidence: 82%

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Tribological and electrochemical performances of Cr/CrN and Cr/CrN/CrAlN multilayer coatings deposited by RF magnetron sputtering

Beliardouh

Bouzid

Nouveau

et al. 2015

Tribology International

109

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. a b s t r a c tCrN/CrAlN and Cr/CrN/CrAlN multilayers were grown with dual RF magnetron sputtering. The application of these multilayers will be wood machining of green wood. That is why ball-on-disc and electrochemical tests in NaCl aqueous solution were realized to elucidate the tribological and corrosion behavior of these coatings as they will be exposed to wear and corrosion during wood machining process. The samples/alumina and samples/WC coupling showed different wear mechanisms. The 300 nm thick Cr/CrN/CrAlN multilayer demonstrated the best tribological behavior and corrosion resistance. The influence of growth defects on corrosion resistance has been shown. .

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Section: Sem Investigationssupporting

confidence: 82%

“…As a consequence, the corrosion resistance of the CrAlN coating may be diminished, as shown by Sanchéz et al [9]. To our knowledge, the exact Al concentration that must be incorporated into the Cr-N system to obtain optimal values of hardness and elastic modulus, simultaneously with high oxidation resistance has never been indicated in the literature [12,13].…”

mentioning

confidence: 92%

Tribological and electrochemical performances of Cr/CrN and Cr/CrN/CrAlN multilayer coatings deposited by RF magnetron sputtering

Beliardouh

Bouzid

Nouveau

et al. 2015

Tribology International

109

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show abstract

“…The wear rate increased consistently with the increase in temperature. (5) The corrosion resistance of the substrate which coated with WBN or W 2 N films was higher than the uncoated substrate. Further improvement in corrosion resistance was obtained with the incorporation of boron.…”

Section: Discussionmentioning

confidence: 98%

“…With the development of modern manufacturing, especially the appearance of dry and high speed machining, low friction coefficient, high hardness and low wear rate are demanded. Many works [3][4][5][6] have been made to further enhance their performance by adding third element into TMeN since S. Vepřek and Reiprich [7] found Ti-Si-N composite films could get ultra-hardness of 80-105 GPa and high toughness.…”

Section: Introductionmentioning

confidence: 99%

Mechanical, tribological and corrosion performance of WBN composite films deposited by reactive magnetron sputtering

Yu¹,

Zhao²,

Xu³

2014

Applied Surface Science

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“…Normally, as the bias voltage is increased, more defects could be created resulting from the enhanced ion bombardment. It is well known that the defects in the sputtered film will prohibit the migration of grain boundaries and small grains will be formed [34], [35]:…”

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confidence: 99%

Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering

Devia

Vélez-Restrepo

2014

ing.cienc.

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TixAl1−xN coatings were grown using the triode magnetron sputtering technique varying the bias voltage between -40 V and -150V. The influence of bias voltage on structural and morphological properties was analyzed by means of energy dispersive spectroscopy, x-ray diffraction and atomic force microscopy techniques. As the bias voltage increased, an increase in the Al atomic percentage was observed competing with Ti and producing structural changes. At low Al concentrations, the film presented a FCC crystalline structure; nevertheless, as Al was increased, the structure presented a mix of FCC and HCP phases. On the other hand, an increase in bias voltage produced a decrease films thickness due to an increase in collisions. Moreover, the grain size and roughness were also strongly influenced by bias voltage. Propiedades morfológicas y estructurales de recubrimientos nitruro de titanio aluminio producidos por magnetron sputtering tríodo Resumen Se crecieron recubrimientos de TixAl1−xN empleando la técnica de magnetron sputtering tríodo, variando el voltaje de polarización entre -40 V y -150V. Por medio de espectroscopía de energía dispersiva, difracción de rayos x y miscroscopía de fuerza atómica, se analizó la influencia del voltaje de polarización sobre las propiedades morfológicas y estructurales de los recubrimientos. A medida que el voltaje bias se incrementó, se observó un aumento en el porcentaje atómico de Al, compitiendo con la concentración de Ti y produciendo cambios estructurales. A bajas concentraciones de Al, la pelćula exhibió una estructura cristalina FCC; sin embargo, a medida que le porcentaje de Al disminuyó, se pudo detectar una mezcla de fases FCC y HCP. Por otro lado, el incremento en el voltaje de polarización produjo una disminución en el espesor de las películas, debido al aumento en el número de colisiones. Además, el tamaño de grano y la rugosidad se vieron fuertemente afectados por el voltaje bías.Palabras clave: TiAlN; voltaje de polarización; sputtering; procentaje atómico; XRD.

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Influence of substrate bias voltage on structure and properties of the CrAlN films deposited by unbalanced magnetron sputtering

Cited by 100 publications

References 35 publications

Tribological and electrochemical performances of Cr/CrN and Cr/CrN/CrAlN multilayer coatings deposited by RF magnetron sputtering

Tribological and electrochemical performances of Cr/CrN and Cr/CrN/CrAlN multilayer coatings deposited by RF magnetron sputtering

Mechanical, tribological and corrosion performance of WBN composite films deposited by reactive magnetron sputtering

Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering

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