Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings

Chang, Hsu‐Kai; Huang, Ping-Kang; Yeh, Jien‐Wei; Davison, A.; Tsau, Chun-Huei; Yang, Chih-Chao

doi:10.1016/j.surfcoat.2007.12.014

Cited by 159 publications

(63 citation statements)

References 35 publications

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“…In Figure 1b, the average grain size, around 7.1 nm, is almost identical for all states. This suggests that grain coarsening is highly suppressed as a result of severe lattice distortion and sluggish diffusion [25][26][27]. Figure 2 shows hysteresis loops of the as-deposited and post-annealed Fe-Co-Ni-Cr-Al-Si thin films.…”

Section: Resultsmentioning

confidence: 99%

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

Lin

Cheng

Chin

2016

Entropy

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Soft magnetic properties of Fe-Co-Ni-Al-Cr-Si thin films were studied. As-deposited Fe-Co-Ni-Al-Cr-Si nano-grained thin films showing no magnetic anisotropy were subjected to field-annealing at different temperatures to induce magnetic anisotropy. Optimized magnetic and electrical properties of Fe-Co-Ni-Al-Cr-Si films annealed at 200 • C are saturation magnetization 9.13 × 10 5 A/m, coercivity 79.6 A/m, out-of-plane uniaxial anisotropy field 1.59 × 10 3 A/m, and electrical resistivity 3.75 µΩ·m. Based on these excellent properties, we employed such films to fabricate magnetic thin film inductor. The performance of the high entropy alloy thin film inductors is superior to that of air core inductor.

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Section: Resultsmentioning

confidence: 99%

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

Lin

Cheng

Chin

2016

Entropy

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“…These HEN coatings, with five or more principal target elements, are reported to possess many attractive properties. For example, the hardness of (AlCrTaTiZr)100−xNx [19,20], (AlCrSiTiV)100−xNx [21], (AlCrMoSiTi)100−xNx [22], and (AlMoNbSiTaTiVZr)100−xNx [23], (TiVCrZrHf)100−xNx [24], and (TiZrNbHfTa)100−xNx [25] all fall in the range of 32-36 GPa when the value of x is about 50. The hardness of (AlCrNbSiTiV)N is even higher (42 GPa), and still remains in the superhard level after vacuum annealing at 1000 °C for 5 h [26,27].…”

Section: Introductionmentioning

confidence: 99%

Machining Performance of Sputter-Deposited (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 High-Entropy Nitride Coatings

2015

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(Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 high-entropy nitride coatings prepared by reactive magnetron sputtering have been proved to have high hardness and superior oxidation resistance. Their thermal stability, adhesion strength, and cutting performance were investigated in this study. Hardness of the coating is 36 GPa, which only decreases slightly to 33 GPa after 900 °C annealing either in air or in vacuum for 2 h. No significant change in phase and microstructure were detected after annealing at 1000 °C. Rockwell C indentation and scratch tests shows that Ti interlayer provides a good adhesion between the nitride film and WC/Co substrates. In various milling tests, inserts coated with (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 have evidently smaller flank wear depth than commercial inserts coated with TiN and TiAlN, even with their smaller thickness. Therefore, the (Al0.34Cr0.22Nb0.11Si0.11Ti0.22)50N50 coating has great potential in hard coating applications.

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“…HE alloys were mostly obtained by rapid solidification, mechanical alloying, CVD and PVD methods respectively. The properties such as strength, hardness, wear resistance and corrosion resistance of the alloys were investigated [6][7][8][9][10][11]. In the HE alloys, the effects of adding elements content (such as Al, B, N, Cr, Ti, Fe and V) on the structure and properties have been considered [12][13][14][15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%