Influence of stress and texture on soft magnetic properties of thin films

Zou, Pei; Yu, Winnie; Bain, J.A.

doi:10.1109/tmag.2002.802705

Cited by 120 publications

(11 citation statements)

References 24 publications

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“…For the dependence of H c , Zou has systematically explained how it is affected by sputtering gas pressure through the inner stress of the film. 13 Apparently, in the present case, a is even more sensitive to the stress than H c . The high tunability of a brings about more high-frequency application potentials of CoFeB thin films.…”

Section: Resultsmentioning

confidence: 49%

“…11 It has been successfully explained by Hoffmann, 12 and been developed by Zou. 13 Similar to FeCoSiN, the largest H k-sta is obtained at the lowest pressure, 0.75 mTorr, where the deterioration of soft magnetic properties (the largest H ce and H ch ) takes place, and it is suggested to be ascribed to the high compressive stress in the film because of the increased high-energy ions or atoms bombarding the substrate surfaces during sputtering. 14 With further increase of pressure from 1.5 mTorr up to 3 mTorr, H ce and H ch keep relatively constant, while H k-sta increases.…”

Section: Resultsmentioning

confidence: 93%

“…The simultaneous obtaining of low H c and high H k-sta values at 3 mTorr shows the optimization of soft magnetic properties, and it is suggested to be due to the suppression of local anisotropy field which directly lowers down H c . 13 The dynamic magnetic properties, or the magnetization dynamics, are studied with the microwave permeability spectra. Figure 3 presents the permeability spectra of CoFeB thin film samples deposited at various sputtering gas pressures.…”

Section: Resultsmentioning

confidence: 99%

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Tuning of magnetization dynamics in sputtered CoFeB thin film by gas pressure

Huang

Liao

et al. 2012

Journal of Applied Physics

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The influences of sputtering gas pressure on the high-frequency magnetization dynamics of as-sputtered CoFeB thin films are studied with permeability spectra based on the Landau-Lifshitz-Gilbert (LLG) equation. Results show that with the pressure increasing, both the anisotropy field and resonance frequency have minimums, while the initial permeability shows a maximum. The damping factor deceases monotonously with the pressure increasing, similar as with the coercivity. The high tunability of the damping factor indicates that controlling sputtering gas pressure could be an effective method in tuning the magnetization dynamics. All these dependences on gas pressure are suggested to be related to the inner stress of these sputtered films.

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Section: Resultsmentioning

confidence: 49%

Section: Resultsmentioning

confidence: 93%

Section: Resultsmentioning

confidence: 99%

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Tuning of magnetization dynamics in sputtered CoFeB thin film by gas pressure

Huang

Liao

et al. 2012

Journal of Applied Physics

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“…A possible explanation for the observed reduction in coercivity in our irradiated samples, is therefore an overall smoother DW energy landscape after irradiation, which allows for domain formation and switching of the magnetization at lower magnetic fields. In addition to that, the release of internal stresses in the film, that has been reported during irradiation 48,49 , can also be responsible for improvements to the soft magnetic properties of our Permalloy 43 .…”

Section: Resultsmentioning

confidence: 77%

“…2 (a). As the magnetization curves at Φ = 0 • and Φ = 90 • are different, a weak uniaxial magnetic anisotropy K u , is present in the as-deposited Ni 81 Fe 19 and might be associated to internal stresses during the material growth or asymmetries in the deposition system 43 . The value of K u = 80(7) J m 3 has been obtained subtracting the area between the easy and hard axis loop of the as-deposited state.…”

Section: Resultsmentioning

confidence: 99%

Optimization of Permalloy properties for magnetic field sensors using He$^+$ irradiation

Masciocchi¹,

Jagt²,

Syskaki³

et al. 2023

Preprint

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Permalloy, despite being a widely utilized soft magnetic material, still calls for optimization in terms of magnetic softness and magnetostriction for its use in magnetoresistive sensor applications. Conventional annealing methods are often insufficient to locally achieve the desired properties for a narrow parameter range. In this study, we report a significant improvement of the magnetic softness and magnetostriction in a 30 nm Permalloy film after He + irradiation. Compared to the as-deposited state, the irradiation treatment reduces the induced anisotropy by a factor ten and the hard axis coercivity by a factor five. In addition, the effective magnetostriction of the film is significantly reduced by a factor ten -below 1 × 10 −7 -after irradiation. All the above mentioned effects can be attributed to the isotropic crystallite growth of the Ni-Fe alloy and to the intermixing at the magnetic layer interfaces under light ion irradiation. We support our findings with X-ray diffraction analysis of the textured Ni 81 Fe 19 alloy. Importantly, the sizable magnetoresistance is preserved after the irradiation. Our results show that compared to traditional annealing methods, the use of He + irradiation leads to significant improvements in the magnetic softness and reduces strain cross sensitivity in Permalloy films required for 3D positioning and compass applications. These improvements, in combination with the local nature of the irradiation process make our finding valuable for the optimization of monolithic integrated sensors, where classic annealing methods cannot be applied due to complex interplay within the components in the device.

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High frequency characteristics and soft magnetic properties of FeCoBN nanocrystalline films

Kim

et al. 2004

phys. stat. sol. (a)

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For developing magnetic materials working in GHz ranges, the soft magnetic properties and high frequency characteristics were examined in as-deposited FeCoBN thin films fabricated by a reactive rf magnetron sputtering method. As a result, these films exhibited high ferromagnetic resonance frequency of 1.5 -4 GHz and good soft magnetic properties, such as 4πM s of 17 ~ 21 kG, ρ of 50 ~ 220 µΩ cm, H c of 3 -90 Oe and H k of 20 -180 Oe. These magnetic properties of the films were discussed related to the microstructures.

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Influence of stress and texture on soft magnetic properties of thin films

Cited by 120 publications

References 24 publications

Tuning of magnetization dynamics in sputtered CoFeB thin film by gas pressure

Tuning of magnetization dynamics in sputtered CoFeB thin film by gas pressure

Optimization of Permalloy properties for magnetic field sensors using He$^+$ irradiation

High frequency characteristics and soft magnetic properties of FeCoBN nanocrystalline films

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