Influence of sputter deposition parameters on the properties of tunable barium strontium titanate thin films for microwave applications

Schafranek, Robert; Giere, A.; Balogh, Adam G.; Enz, Thorsten; Zheng, Yelong; Scheele, P.; Jakoby, Rolf; Klein, Andreas

doi:10.1016/j.jeurceramsoc.2008.08.034

Cited by 36 publications

(37 citation statements)

References 36 publications

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“…Data on thin-film ferroelectrics, using different deposition techniques, which have resulted in a high tunability and low losses, were collected for parallel-plate MIM capacitors at 1 MHz for Ba x Sr 1−x TiO 3 (BST) [17]- [25]. Data of BST between 1 and 10 GHz are given in [17] and [21].…”

Section: B Dielectric Varactorsmentioning

confidence: 99%

On the Trade-Off Between Quality Factor and Tuning Ratio in Tunable High-Frequency Capacitors

Tiggelman

Reimann

Rijs

et al. 2009

IEEE Trans. Electron Devices

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Abstract-A benchmark of tunable and switchable devices at microwave frequencies is presented on the basis of physical limitations to show their potential for reconfigurable cellular applications. Performance limitations are outlined for each given technology focusing on the quality factor (Q) and tuning ratio (η) as figures of merit. The state of the art in terms of these figures of merit of several tunable and switchable technologies is visualized and discussed. If the performance of these criteria is not met, the application will not be feasible. The quality factor can typically be traded off for tuning ratio. The benchmark of tunable capacitor technologies shows that transistor-switched capacitors, varactor diodes, and ferroelectric varactors perform well at 2 GHz for tuning ratios below 3, with an advantage for GaAs varactor diodes. Planar microelectromechanical capacitive switches have the potential to outperform all other technologies at tuning ratios higher than 8. Capacitors based on tunable dielectrics have the highest miniaturization potential, whereas semiconductor devices benefit from the existing manufacturing infrastructure.

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Section: B Dielectric Varactorsmentioning

confidence: 99%

On the Trade-Off Between Quality Factor and Tuning Ratio in Tunable High-Frequency Capacitors

Tiggelman

Reimann

Rijs

et al. 2009

IEEE Trans. Electron Devices

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“…Figure 2.4 -The results are based on a literature survey on the performance of dielectric parallel plate MIM varactors in terms of Q and η. The solid line is a fit to the best reported measurement results of ferroelectric varactors (BaxSr1−xTiO3 (BST), squares) at 1 MHz [40][41][42][43][44][45][46][47][48]. Data of BST for 1-10 GHz are plotted as diamonds [40,41].…”

Section: Dielectric Varactorsmentioning

confidence: 99%

“…Data on thin film ferroelectrics, using different deposition techniques, which have resulted in a high tunability and low losses were collected for parallel plate MIM capacitors at 1 MHz for Ba x Sr 1−x TiO 3 (BST) [40][41][42][43][44][45][46][47][48]. Data of BST between 1-10 GHz is given in [40] and [41].…”

Section: Dielectric Varactorsmentioning

confidence: 99%

“…Since the 1940's numerous research groups worldwide have devoted research to Ba x Sr 1−x Ti 1+y O 3+z [24,32,38,40,41,48,83,[99][100][101][102][103][104][105][106]. The understanding of the physical behavior of barium titanate ceramics started to evolve between 1940-1950 [24,99].…”

Section: Barium Strontium Titanate As a Ferroelectricmentioning

confidence: 99%

“…The Ti adhesion layer was replaced by a TiO 2 layer (see paragraphs 6.4 and 6.5.4) to obtain a good tuning ratio to allow thinner BST layers. Other research groups also opted for a TiO 2 /Pt configuration for the bottom metal electrodes [41,48,141]. Thicker Pt bottom electrodes were investigated to lower the series resistance and block the Ti diffusion.…”

Section: Metal Electrodesmentioning

confidence: 99%

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Influence of sputter deposition parameters on the properties of tunable barium strontium titanate thin films for microwave applications

Cited by 36 publications

References 36 publications

On the Trade-Off Between Quality Factor and Tuning Ratio in Tunable High-Frequency Capacitors

On the Trade-Off Between Quality Factor and Tuning Ratio in Tunable High-Frequency Capacitors

Thin fim barium strontium titanate capacitors for tunable RF frond-end applications

Vapor‐Phase Deposition of Oxides

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