2022
DOI: 10.1007/s00339-022-06166-9
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Influence of spark plasma sintering and reaction bonded SiC targets on pulsed laser deposition of 6H-SiC thin films

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“…The main sintering methods of SiC ceramics are pressureless sintering [ 11 , 12 , 13 ] and reaction sintering [ 14 , 15 ], but the two sintering have low purity. To avoid these drawbacks, researchers have developed the hot pressing sintering method [ 9 , 16 , 17 ], spark plasma sintering [ 18 , 19 , 20 ], microwave sintering [ 21 ], hot isostatic sintering [ 22 ], and so on. Each of these techniques offers its own set of advantages and disadvantages, with numerous valuable research findings to support their efficacy.…”
Section: Introductionmentioning
confidence: 99%
“…The main sintering methods of SiC ceramics are pressureless sintering [ 11 , 12 , 13 ] and reaction sintering [ 14 , 15 ], but the two sintering have low purity. To avoid these drawbacks, researchers have developed the hot pressing sintering method [ 9 , 16 , 17 ], spark plasma sintering [ 18 , 19 , 20 ], microwave sintering [ 21 ], hot isostatic sintering [ 22 ], and so on. Each of these techniques offers its own set of advantages and disadvantages, with numerous valuable research findings to support their efficacy.…”
Section: Introductionmentioning
confidence: 99%