Abstract:LBO crystal with high quality surface, which must be defect-free and super smooth, is urgently needed because of its applications in high energy laser system. Chemical mechanical polishing (CMP) is adopted to raise surface quality and processing efficiency in super precision polishing of LBO crystal. The polyurethane pad and colloidal SiO 2 slurry are chosen and the polishing experiments are performed on Logitech PM5 Precision Lapping & Polishing Machine. The slurry pH is changed and its influence on material … Show more
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