2003
DOI: 10.1109/tasc.2003.812005
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Influence of sequential etching on YBCO films deposited by PLD from a nanostructured target

Abstract: Thin YBa 2 Cu 3 O 6+ (YBCO) films with = 90 K and high critical current in the order of 10 7 A cm 2 at 77 K are prepared with pulsed laser deposition from a nanostructured target. Changes in the superconducting and structural properties of the films are investigated after repeated thinning by Ar-ion sputtering or by electrochemical etching. As shown by Auger depth profiling, the chemical composition is preserved through the film during Ar-ion sputtering while electrochemical etching changes the atomic concentr… Show more

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Cited by 3 publications
(5 citation statements)
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“…On the other side, the critical current density of YBCO tape is far lower than that of YBCO films. For example, the of small film produced by PLD process could be higher than [4], while the of HTS tape produced by the similar process is about . To date, there is not an effective depiction of the inhomogeneities of superconducting properties, and the investigations on these problems are rarely reported [5].…”
Section: Introductionmentioning
confidence: 95%
“…On the other side, the critical current density of YBCO tape is far lower than that of YBCO films. For example, the of small film produced by PLD process could be higher than [4], while the of HTS tape produced by the similar process is about . To date, there is not an effective depiction of the inhomogeneities of superconducting properties, and the investigations on these problems are rarely reported [5].…”
Section: Introductionmentioning
confidence: 95%
“…Following the extensive applications [1] of YBCO High temperature superconducting film and relative devices in the fields of aviation, spaceflight and military, the etching technology of YBCO film become the worldwide researching emphases [2]. Wet chemical etching and dry ion etching are the main etching technologies of YBCO film in existence [3], but these two methods have intrinsic limitations.…”
Section: Introductionmentioning
confidence: 99%
“…Wet chemical etching and dry ion etching are the main etching technologies of YBCO film in existence [3], but these two methods have intrinsic limitations. The disadvantages of common wet chemical etching technology include low etching rate, long etching duration, marked traverse etching and so on [4]. Whereas for the influence of ion damage on YBCO film underlay [5] and excess etching in dry ion etching technology [6], the capability such as velocity and frequency will be affected badly with the development and application of multilayer YBCO devices [7].…”
Section: Introductionmentioning
confidence: 99%
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