Influence of room-temperature oxidation on stability and performance of reactively sputtered TaN thin films for high-precision sheet resistors

Zhang, Mingzhen; Wang, Yue; Song, Shangzhi; Guo, Ruiqiang; Zhang, Wenbin; Li, Chengming; Wei, Junjun; Jiang, Puqing; Yang, Ronggui

doi:10.1016/j.surfin.2024.104088

Surfaces and Interfaces

2024

DOI: 10.1016/j.surfin.2024.104088

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Influence of room-temperature oxidation on stability and performance of reactively sputtered TaN thin films for high-precision sheet resistors

Mingzhen Zhang,

Yue Wang,

Shangzhi Song

et al.

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Influence of room-temperature oxidation on stability and performance of reactively sputtered TaN thin films for high-precision sheet resistors

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References 30 publications

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