Influence of RF(N2) plasma conditions on the chemical interaction and stability of activated nitrogen with polycrystalline diamond surfaces: A XPS, TPD and HREELS study

Atomistic Insight into Nitrogen-Terminated Diamond(001) Surfaces by the Adsorption of N, NH, and NH2: A Density Functional Theory Study

“…By contrast, radio frequency N 2 plasma (∼ 40 kHz) were found by high-resolution electron energy loss spectroscopy (HREELS) to generate multiple surface species of C–N, CN, and CN on diamond(001), demonstrating the tunability of surface doping by varying plasma frequency. Similar results were obtained on polycrystalline diamond samples, which further suggested the involvement of surface hydrogen. , …”

“…For each case, we identify the favored adsorption geometry by total energy calculations and evaluate the nature of surface bonding by analyzing the density of states (DOS) and the corresponding charge distribution. Further calculations of the vibration of the adsorbed nitrogen species and the 1s core-level shift of surface carbons are complementary to the recent works that used HREELS and XPS, − calling for re-interpretation of some spectrum features in the literature. − Lastly, we present simulated images of adsorbed nitrogen species on diamond(001), in preparation for future work using scanning tunneling microscopy (STM). Our results highlight the flexibility of the nitridation of diamond surfaces, offering opportunities of controlling both the number and charge state of the shallow NV centers in the layer-by-layer construction of diamond-based devices.…”

“…The formation of NH 3 from the adsorption of NH 2 onto prehydrogenated diamond(001) is unlikely based on previous work using temperature-programmable desorption. 24 3.3. Effect of Surface Hydrogenation.…”

“…Similar results were obtained on polycrystalline diamond samples, which further suggested the involvement of surface hydrogen. 24,25 Despite the valuable insight gained from the prior works, 23−26 there remains some ambiguity around the nitridated diamond surfaces, such as the composite, structure, and chemical state of the adsorbed nitrogen species. Here, we present DFT studies on the adsorption of representative nitrogen species (N, NH, and NH 2 ) on bare and hydrogenated diamond(001) surfaces, aiming to shed light on the atomistic description of the nitridated diamond surfaces.…”

Novel Ultra Localized and Dense Nitrogen Delta-Doping in Diamond for Advanced Quantum Sensing

“…It was previously found that the structural sensitivity and thermal stability of adsorbed nitrogen onto poly diamond and (100) single crystal diamond surfaces exposed to nitrogen RF plasma were similar. 21,22 These aforementioned measurements and comprehensive analyses are provided in the Supporting Information (Figure S2). The results conclude that the MW nitridation process does not damage the exposed diamond surface, that is, retains its crystalline structure, and that some of the nitrogen bonds on the diamond surface are stable upon annealing above 700 °C and remain intact in vacuum.…”