Nanolaminates
using alternating inorganic and organic layers have
the potential to provide ultrabarrier with high resistance to gas
permeation while also changing the crack onset strain (COS) to improve
mechanical reliability. Previous modeling efforts highlighted the
possibility to achieve an optimized design depending on thickness
and material properties (elastic modulus, fracture energy), producing
the highest possible value of COS. In this study, we experimentally
show that the optimization can be achieved using SiN
x
/CYTOP laminates when guided by theoretical predictions. Nanolaminates
using silicon nitride (SiN
x
) inorganic
films and CYTOP organic films were fabricated. The fracture energy
of the CYTOP layer was found to be 90 ± 10 J/m2. A
50% increase in COS (from 1.7 to 2.5%) was experimentally measured
as a result of the thickness ratio optimization for a 3-layer structure
consisting of two 30 nm thick SiN
x
layers
and one 33 nm thick CYTOP layer. In the same way, a 70% increase in
COS (from 1.7 to 2.8%) was measured for a 5-layer structure consisting
of three 20 nm thick SiN
x
layers and two
25 nm thick CYTOP layers. The numerical results also showed that a
45%, 73%, 110%, and 160% increase in COS can be obtained in 3-, 5-,
9-, and 19-layer structures, respectively, if the total thickness
ratio of CYTOP to SiN
x
layer is at the
optimized value, i.e., ∼0.55, 0.83, 2.67, and 9, respectively.
The same procedure can be applied to all inorganic/organic multilayered
films to find the optimized COS, including the measurement of high
fracture energy of organic layers, enabling the design of mechanically
robust permeation barriers for flexible electronics.