Influence of reactive surface groups on the deposition of oxides thin film by atomic layer deposition

Riyanto, Edy; Huang, Gaoshan; Zhao, Yuting; Guo, Ying; Zhang, Jing; Mei, Yongfeng; Shi, Jianjun

doi:10.1016/j.surfcoat.2017.09.047

Cited by 15 publications

(13 citation statements)

References 30 publications

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“…4 shows the effect of plasma treatment and ageing process as a function of time on water contact angles as a representative for surface wettability. The presence of hydrophilic oxygenrelated functional groups, which acts primarily to adsorp water molecules, increases wetting property of the surface and the water contact angle decreases correspondingly [16,17]. In the effect of plasma treatment time, the measurement demonstrates that the average water contact angle of the polyimide without treatment was 81.58°and reduced to 17.42, 15.52, 12.56, 9.83 and 7.25°for polyimide treated by helium gas DBD plasma (4 l/min) with plasma power of 200 W for 15, 20, 25, 30 and 60 s, respectively (Fig.…”

Section: Resultsmentioning

confidence: 99%

Surface treatment of polyimide using atmospheric pressure dielectric barrier discharge plasma

Riyanto¹

2020

ScienceAsia

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In this study, polyimide was treated by atmospheric pressure dielectric barrier discharge plasma using a helium and/or helium-oxygen mixture gasses. The polyimide was placed between copper electrodes with dielectric material installed on the cathode electrode. To investigate the surface treatment, the plasmas as a function of power, treatment time, and plasma gasses were introduced on the polyimide substrate. The experimental results show that the polyimide treated by dielectric barrier discharge plasma increases the wetting property. This property can be attributed to the surface roughness and the water compatible functional groups. The roughness increases by helium plasma treatment and can be further improved by increasing plasma power or the presence of oxygen in the helium-oxygen mixture plasma. On the other hand, the plasma surface treatment led to formation of oxygen related functional groups of −C− −O and −OH.

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Section: Resultsmentioning

confidence: 99%

Surface treatment of polyimide using atmospheric pressure dielectric barrier discharge plasma

Riyanto¹

2020

ScienceAsia

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“…The required cycle number to get a continuous growth in the interfacial region may depend on the porous structure formed by polymer chains on the near surface region and the deposited ALD materials. It was shown the effect of ALD materials and the cycle number on the growth mechanisms onto polyethyleneterephthalate (PET) substrate as shown in Fig.4 (Edy et al, 2017). Figure 4 is PET surface image without ALD layer (Fig.4(a)) and the surface that has been coated by ALD of TiO2, Al2O3, and Al2O3/TiO2 bilayer (Fig.…”

Section: Interfacial Diffusion Growthmentioning

confidence: 99%

“…It is due the Al2O3 layer acted as base substrate for the TiO2 layer can be as a buffer layer. Structurally, PET has numerous functional groups of C=O as carbonyl site (Edy et al, 2017;Edy et al, 2013). In the initial growth, the provided C=O groups react to the elements of the precursors of the growth materials.…”

Section: Interfacial Diffusion Growthmentioning

confidence: 99%

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The Growth Mechanisms of Atomic Layer Deposition: An Overview

Riyanto

Martides

Junianto

et al. 2020

Eksergi

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In this review, the discussion emphasized on the growth mechanisms of atomic layer deposition which consists of a theoretical model and experimentally growth as well as the measurement testing as evidences. The deposition process description with some testing evidences can be used to facilitate in the effort to understand the basic concept of ALD growth mechanisms. Some metal oxides like Al2O3, HfO2, and TiO2 with these employed precursors are typically used for the detailed illustration during the reaction steps. Although the surface chemistry of ALD process has been well understood, systematic description which combine a theoretical and experimentally growth mechanism is still missing. This paper aims to provide a better understanding of ALD growth mechanisms and surface chemistry which eventually able to contribute on the thin film growth processing.

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“…GA was firstly fabricated via a template-free, freeze-drying strategy and then coated with ZnO nanomembranes via atomic layer deposition (ALD) [25]. The components of GAZ composites can be easily tuned by changing the number of ALD cycles, which has been demonstrated in our previous researches [27–30]. In the composite, GA works as conductive skeletons and supports for ZnO nanomembranes.…”

Section: Introductionmentioning

confidence: 99%

Cycling-Induced Capacity Increase of Graphene Aerogel/ZnO Nanomembrane Composite Anode Fabricated by Atomic Layer Deposition

Wang

Zhao

et al. 2019

Nanoscale Res Lett

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Zinc oxide (ZnO) nanomembranes/graphene aerogel (GAZ) composites were successfully fabricated via atomic layer deposition (ALD). The composition of GAZ composites can be controlled by changing the number of ALD cycles. Experimental results demonstrated that the anode made from GAZ composite with ZnO nanomembrane of 100 ALD cycles exhibited highest specific capacity and best rate performance. A capacity increase of more than 2 times during the first 500 cycles was observed, and a highest capacity of 1200 mAh g −1 at current density of 1000 mA g −1 was observed after 500 cycles. On the basis of detailed electrochemical investigations, we ascribe the remarkable cycling-induced capacity increase to the alloying process accompanied by the formation of a polymer layer resulting from kinetically activated electrolyte degradation at low voltage regions. Electronic supplementary material The online version of this article (10.1186/s11671-019-2900-7) contains supplementary material, which is available to authorized users.

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Influence of reactive surface groups on the deposition of oxides thin film by atomic layer deposition

Cited by 15 publications

References 30 publications

Surface treatment of polyimide using atmospheric pressure dielectric barrier discharge plasma

Surface treatment of polyimide using atmospheric pressure dielectric barrier discharge plasma

The Growth Mechanisms of Atomic Layer Deposition: An Overview

Cycling-Induced Capacity Increase of Graphene Aerogel/ZnO Nanomembrane Composite Anode Fabricated by Atomic Layer Deposition

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