Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties

As a promising functional material, ferroelectric Pb(ZrxTi1−x)O3 (PZT) are widely used in many optical and electronic devices. Remarkably, as the film thickness decreases, the materials’ properties deviate gradually from those of solid materials. In this work, multilayered PZT thin films with different thicknesses are fabricated by Sol-Gel technique. The thickness effect on its microstructure, ferroelectric, and optical properties has been studied. It is found that the surface quality and the crystalline structure vary with the film thickness. Moreover, the increasing film thickness results in a significant increase in remnant polarization, due to the interfacial layer effect. Meanwhile, the dielectric loss and tunability are strongly dependent on thickness. In terms of optical properties, the refractive index of PZT films increase with the increasing thickness, and the photorefractive effect are also influenced by the thickness, which could all be related to the film density and photovoltaic effect. Besides, the band gap decreases as the film thickness increases. This work is significant for the application of PZT thin film in optical and optoelectronic devices.

Section: Introductionmentioning

confidence: 99%

Thickness Dependence of Ferroelectric and Optical Properties in Pb(Zr0.53Ti0.47)O3 Thin Films

Chen

et al. 2019

“…These microcantilevers were also tested experimentally. Geometric parameters of the OPT RAT model ( l = 1 mm, width 0.1 mm) were used to fabricate a prototype of the piezoelectric VEH by employing the proposed rationally-shaped substrate made of nickel that was covered with three segments of a screen-printed piezocomposite layer (Polyvinyl butyral 20% mixed with PZT nanopowder) with electrodes [ 20 ].…”

Section: Study Of Piezoelectric Vibro-impacting Veh Prototype Basementioning

confidence: 99%

Rational Design Approach for Enhancing Higher-Mode Response of a Microcantilever in Vibro-Impacting Mode

Migliniene

Ostaševičius

Gaidys

et al. 2017

Self Cite

This paper proposes an approach for designing an efficient vibration energy harvester based on a vibro-impacting piezoelectric microcantilever with a geometric shape that has been rationally modified in accordance with results of dynamic optimization. The design goal is to increase the amplitudes of higher-order vibration modes induced during the vibro-impact response of the piezoelectric transducer, thereby providing a means to improve the energy conversion efficiency and power output. A rational configuration of the energy harvester is proposed and it is demonstrated that the new design retains essential modal characteristics of the optimal microcantilever structures, further providing the added benefit of less costly fabrication. The effects of structural dynamics associated with advantageous exploitation of higher vibration modes are analyzed experimentally by means of laser vibrometry as well as numerically via transient simulations of microcantilever response to random excitation. Electrical characterization results indicate that the proposed harvester outperforms its conventional counterpart (based on the microcantilever of the constant cross-section) in terms of generated electrical output. Reported results may serve for the development of impact-type micropower generators with harvesting performance that is enhanced by virtue of self-excitation of large intensity higher-order mode responses when the piezoelectric transducer is subjected to relatively low-frequency excitation with strongly variable vibration magnitudes.

“…Therefore, traditional acoustophoresis devices must be improved. Development of lead-free piezoceramics by replacing traditional lead zirconium titanate (PZT) ceramics [ 12 , 13 , 14 ] has gained huge interest in the field of biologically compatible manipulation techniques.…”

Section: Introductionmentioning

confidence: 99%

“…PZT for over 50 years has been a very popular and widely studied ceramic allowing to synthesize a large number of materials with different properties due to the range of Zr:Ti ratios used in synthesis process [ 12 , 13 , 14 , 15 ]. However, in the past few years the toxicity of lead oxide was highly discussed encouraging the development of lead-free piezoceramics and devices for medical, pharmaceutical, and other applications.…”

Section: Introductionmentioning

confidence: 99%

Biologically Compatible Lead-Free Piezoelectric Composite for Acoustophoresis Based Particle Manipulation Techniques

Janušas

Urbaite

Palevičius

et al. 2021

Self Cite

This research paper is concentrated on the design of biologically compatible lead-free piezoelectric composites which may eventually replace traditional lead zirconium titanate (PZT) in micromechanical fluidics, the predominantly used ferroelectric material today. Thus, a lead-free barium–calcium zirconate titanate (BCZT) composite was synthesized, its crystalline structure and size, surface morphology, chemical, and piezoelectric properties were analyzed, together with the investigations done in variation of composite thin film thickness and its effect on the element properties. Four elements with different thicknesses of BCZT layers were fabricated and investigated in order to design a functional acoustophoresis micromechanical fluidic element, based on bulk acoustic generation for particle control technologies. Main methods used in this research were as follows: FTIR and XRD for evaluation of chemical and phase composition; SEM—for surface morphology; wettability measurements were used for surface free energy evaluation; a laser triangular sensing system—for evaluation of piezoelectric properties. XRD results allowed calculating the average crystallite size, which was 65.68 Å3 confirming the formation of BCZT nanoparticles. SEM micrographs results showed that BCZT thin films have some porosities on the surface with grain size ranging from 0.2 to 7.2 µm. Measurements of wettability showed that thin film surfaces are partially wetting and hydrophilic, with high degree of wettability and strong solid/liquid interactions for liquids. The critical surface tension was calculated in the range from 20.05 to 27.20 mN/m. Finally, investigations of piezoelectric properties showed significant results of lead-free piezoelectric composite, i.e., under 5 N force impulse thin films generated from 76 mV up to 782 mV voltages. Moreover, an experimental analysis showed that a designed lead-free BCZT element creates bulk acoustic waves and allows manipulating bio particles in this fluidic system.