2022
DOI: 10.3390/mi13071118
|View full text |Cite
|
Sign up to set email alerts
|

Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics

Abstract: SiC ceramics have excellent comprehensive properties and are typical hard and brittle materials that are difficult to process and are widely used in many fields. Laser polishing technology has developed into a new surface processing technology, and femtosecond laser polishing has become an important method for the precision machining of hard and brittle materials. In this paper, SiC ceramics were ablated and polished by infrared femtosecond laser, the laser ablation threshold of SiC ceramics was calculated and… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
5
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
8
1

Relationship

1
8

Authors

Journals

citations
Cited by 14 publications
(7 citation statements)
references
References 32 publications
0
5
0
Order By: Relevance
“…When the nanosecond laser acts on the surface of the material, the high temperature triggers a series of chemical reactions, such as the formation of oxides, and finally, leads to the removal of CMC-SiCf/SiC under the influence of various physical and chemical factors. In the process of nanosecond laser grooving, there is an oxidation phenomenon, and the white solid particles produced are SiO 2 [ 27 ].…”
Section: Resultsmentioning
confidence: 99%
“…When the nanosecond laser acts on the surface of the material, the high temperature triggers a series of chemical reactions, such as the formation of oxides, and finally, leads to the removal of CMC-SiCf/SiC under the influence of various physical and chemical factors. In the process of nanosecond laser grooving, there is an oxidation phenomenon, and the white solid particles produced are SiO 2 [ 27 ].…”
Section: Resultsmentioning
confidence: 99%
“…Because of the longer duration of larger molten pool, if the laser frequency is further increased until the pulse interval is less than molten pool duration, the continuous melting process will become a quasicontinuous melting process [205]. Laser diameter decreases with the increase of defocus amount [203,235,236]. When focus energy intensity is too much, a certain amount of defocusing will greatly help to reduce the surface roughness.…”
Section: Machining Characteristics Of Lmpmentioning
confidence: 99%
“…Laser ablation threshold refers to the minimum laser energy density required to achieve material removal using a laser 8 .…”
Section: Calculation and Analysis Of Laser Single Pulse Ablation Thre...mentioning
confidence: 99%
“…The microcrack is mainly caused by the thermal stress. Zhang et al 8 used femtosecond laser to ablate and polish SiC ceramic. The results show that the laser ablation threshold of SiC ceramics is 0.355 J / cm 2 under specific experimental parameters.…”
Section: Introductionmentioning
confidence: 99%