Influence of Pressure-Equalizing Groove on Static Load Performance of Aerostatic Guideway
Abstract:The load capacity and static stiffness of the existing air hydrostatic guideways are relatively low, and the static performance of the air film is degraded when external forces are increased during the process. Therefore, this study considered an aerostatic guideway of an ultra-precision micromachine tool as the research object. Single- and double-row orifice structures were designed on the guideway, and linear, extended, and X-shaped pressure-equalizing groove (PEG) structures with rectangular cross-sections … Show more
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