2008
DOI: 10.1016/j.jnoncrysol.2007.10.056
|View full text |Cite
|
Sign up to set email alerts
|

Influence of plasma power and substrate temperature on structure of nanocrystalline germanium carbon thin films by VHF plasma CVD

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
2

Citation Types

0
5
0

Year Published

2010
2010
2017
2017

Publication Types

Select...
5
3

Relationship

0
8

Authors

Journals

citations
Cited by 11 publications
(5 citation statements)
references
References 13 publications
(13 reference statements)
0
5
0
Order By: Relevance
“…The profile of as-deposited Ge/Au (0/4.8/0.2) had a broad shoulder at 270 cm À1 , which could be assigned to GeÀGe bonds in the amorphous phase. 18 On the other hand, the profile of the as-deposited sample (0/4.6/0.4) showed a small but apparent peak near 292 cm À1 . Therefore, even without annealing, the recrystallization process could be advanced.…”
Section: Resultsmentioning
confidence: 96%
See 1 more Smart Citation
“…The profile of as-deposited Ge/Au (0/4.8/0.2) had a broad shoulder at 270 cm À1 , which could be assigned to GeÀGe bonds in the amorphous phase. 18 On the other hand, the profile of the as-deposited sample (0/4.6/0.4) showed a small but apparent peak near 292 cm À1 . Therefore, even without annealing, the recrystallization process could be advanced.…”
Section: Resultsmentioning
confidence: 96%
“…All four profiles of both annealed samples, (0/4.8/0.2) and (0/4.6/0.4), had almost the same shape, which was centered at 302 cm À1 and had no shoulder. The peak at 302 cm À1 was assigned to crystalline Ge, 18 and there was almost no amorphous phase present. Figure 7 shows the annealing temperature dependence of the absolute value of the thermoelectric power at room temperature.…”
Section: Resultsmentioning
confidence: 99%
“…In the Raman spectra, the broad peak and sharp peak are obtained at around 275 and around 297 cm − 1 , respectively. The broad peak was assigned to amorphous Ge-Ge TO mode peak and the sharp peak was assigned to crystalline Ge-Ge TO mode peak [14]. Crystalline volume fraction (X c ) of films was obtained by using Gaussian fitting from Raman spectra.…”
Section: Resultsmentioning
confidence: 99%
“…[1][2][3] Moreover, Ge 1−x C x double-layer deposited on ZnS infrared window can be served as an effective antireflection and protection coating. 4,5 Some breakthroughs have been made in the synthesis of germanium carbides for the past decades in spite of the extremely low solubility (10 8 cm −3 ) of carbon in bulk germanium under equilibrium conditions.…”
Section: Introductionmentioning
confidence: 99%