2020
DOI: 10.1007/s12540-020-00795-6
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Influence of Phase Composition in TiAlSiN Hard Coatings on the Evolution of Structure and Mechanical Properties

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Cited by 3 publications
(2 citation statements)
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“…Its mechanical properties were determined by the composition and distribution of constituent phases. As reported [32][33][34], when the grain size was refined, the increased density of the grain boundaries decreased the number of dislocation pile-ups and concomitantly increased coating strength, as well as blocked crack propagation in the amorphous Si 3 N 4 phase. Moreover, the preferred growth orientation of the dense planes in the grains can further increase coating hardness and toughness, derived from the larger elastic constant between the nanocrystalline and amorphous phases [13].…”
Section: Introductionsupporting
confidence: 53%
“…Its mechanical properties were determined by the composition and distribution of constituent phases. As reported [32][33][34], when the grain size was refined, the increased density of the grain boundaries decreased the number of dislocation pile-ups and concomitantly increased coating strength, as well as blocked crack propagation in the amorphous Si 3 N 4 phase. Moreover, the preferred growth orientation of the dense planes in the grains can further increase coating hardness and toughness, derived from the larger elastic constant between the nanocrystalline and amorphous phases [13].…”
Section: Introductionsupporting
confidence: 53%
“…A number of groups have deposited TiAlSiN coatings by various PVD methods, such as magnetron sputtering [12][13][14][15][16][17], arc ion plating [18][19][20][21][22], cathodic arc evaporation [23][24][25][26][27][28], and the arc ion plating combined with a magnetron sputtering technique [29][30][31]. Li et al [32] concerned the synthesis of TiAlSiN films from the corresponding metal alkoxide mixtures using the liquid injection plasma-enhanced CVD (PECVD) method.…”
Section: Introductionmentioning
confidence: 99%