Influence of parameters of the discharge with a self-heating hollow cathode and a sectional anode on the activation degree of a vapor-gas medium

Abstract

The composition of a discharge plasma with a self-heating hollow cathode and a sectional anode including an evaporated titanium anode has been studied by optical emission spectroscopy. The effect of discharge parameters on the activation degree of a vapor-gas medium including argon, titanium vapor, hexamethyldisilazane vapor, as well as reactive gases nitrogen and acetylene is investigated. It is shown that by changing the discharge parameters it is possible to change the plasma composition within a wide range, in particular, the fraction and degree of ionization of Ti vapors, the dissociation degree of nitrogen and acetylene.