2013
DOI: 10.1021/cm400562u
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Influence of Oxygen Exposure on the Nucleation of Platinum Atomic Layer Deposition: Consequences for Film Growth, Nanopatterning, and Nanoparticle Synthesis

Abstract: Control of the nucleation behavior during atomic layer deposition (ALD) of metals is of great importance for the deposition of metallic thin films and nanoparticles, and for nanopatterning applications. In this work it is established for Pt ALD, that the exposure to O2 during the O2 pulse of the ALD process is the key parameter controlling the nucleation behavior. The O2 dependence of the Pt nucleation is explained by the enhanced diffusion of Pt species in the presence of oxygen, and the resulting faster aggr… Show more

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Cited by 128 publications
(166 citation statements)
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References 63 publications
(94 reference statements)
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“…The diameter of the NPs increases with 0.06 ± 0.02 nm/cycle, which corresponds to an increase of the shell thickness of 0.03 ± 0.01 nm/cycle. This thickness increase of the shell can be compared to the growthper-cycle of 0.045 nm/cycle typically observed for ALD of planar Pt films [41,51]. It shows that the Pt shell can be tailored with control of the thickness through the choice of the number of ALD cycles and with a thickness precision of 0.03 nm.…”
Section: Resultsmentioning
confidence: 71%
“…The diameter of the NPs increases with 0.06 ± 0.02 nm/cycle, which corresponds to an increase of the shell thickness of 0.03 ± 0.01 nm/cycle. This thickness increase of the shell can be compared to the growthper-cycle of 0.045 nm/cycle typically observed for ALD of planar Pt films [41,51]. It shows that the Pt shell can be tailored with control of the thickness through the choice of the number of ALD cycles and with a thickness precision of 0.03 nm.…”
Section: Resultsmentioning
confidence: 71%
“…In brief, such ALD process, by relying on high oxygen partial pressures (i.e., 0.2 bar) and oxygen exposures on the order of minutes, enables the deposition of metallic Pt NPs at temperatures (e.g., 100°C) at which conventional ALD would otherwise lead to negligible deposition without resorting to powerful oxidizers such as ozone and oxygen plasma. 18,25,42,43 The Pt/GNP composites were obtained after 1, 3, and 10 ALD cycles carried out at both 100°C and 200°C. In addition, we also carried out 10 ALD cycles at 250°C to establish a worse case reference for the initial particle size distribution (PSD) span.…”
Section: Resultsmentioning
confidence: 99%
“…Instead, the PSDs of the Pt/GNP composites obtained after 1 and 3 cycles will be discussed in a later section dedicated to the sintering of the Pt NPs during the catalytic test. 10 cycles of conventional thermal Pt ALD, that is, ALD carried out at 250°C, 18,21,27,42 gave rise to a very broad rightskewed number-based PSD characterized by a numerous population of small NPs of about 1 nm coexisting next to NPs as large as 24 nm. The analysis of the mass-based PSD shows that, at such conditions, 80% of the platinum mass lies in NPs whose size range spans over more than 12 nm (see Fig.…”
Section: Resultsmentioning
confidence: 99%
“…This is, however, not necessarily so: a foreign wall may have a structure that is incompatible with that of the crystal, which may even hinder nucleation. Besides the essential role played in materials science, heterogeneous nucleation attracts a growing attention recently due to the emerging technological interest, for example, in micro-and nanopatterning techniques, [2] and controlling the related nanoscale processes, such as crystallization on patterned surfaces, the formation of quantum dots, [3][4][5][6] the controlling of the properties of partly crystalline glass ceramics, [1] phase selection in alloys, [7] and nucleation of metals on graphene. [8] Particulate additives are often used as nucleating agents to control the grain size of the solidified matter.…”
Section: Introductionmentioning
confidence: 99%