Influence of Oxygen and Nitrogen Flow Ratios on the Microstructure Evolution in AlCrTaTiZr High-Entropy Oxynitride Films
Yung-Chu Liang,
Ching-Yin Lee,
Miao-I Lin
et al.
Abstract:This study explores the influence of oxygen and nitrogen flow ratios on the microstructure and mechanical properties of AlCrTaTiZr high-entropy oxynitride films. Oxygen flow rates (0%–0.75%) were adjusted while maintaining a fixed nitrogen flow ratio (RN = 15%) to fabricate films with similar compositions. The results show that increasing oxygen flow enhanced hardness through solid solution strengthening and grain refinement, though excessive oxygen caused an amorphous structure and reduced hardness. After ann… Show more
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