INFLUENCE OF OXIGEN CONTENT IN WORKING GAS ON THE ELECTRICAL PROPERTIES OF THIN FILMS Zn1-x Mnx O, OBTAINED BY REACTIVE MAGNETRON SPUTTERING

Abstract

Äîñë³äaeåíî âïëèâ ïðîöåíòíîãî ñï³ââ³äíîøåííÿ ñóì³ø³ ðîáî÷èõ ãàç³â êèñíþ ³ àðãîíó, òåìïåðàòóðè îñàäaeåííÿ ï³äêëàäêè ³ ïîäàëüøîãî â³äïàëó íà ïèòîìèé îï³ð ïë³âîê Zn 1-x Mn x O (0≤x≤0,10), îäåðaeàíèõ ìåòîäîì Â×-ìàãíåòðîííîãî ðîçïèëþâàííÿ. Ïîêàçàíà ìîaeëèâ³ñòü ö³ëåñïðÿìîâàíîãî êåðóâàííÿ åëåêòðè÷íèìè âëàñòèâîñòÿìè äàíèõ ïë³âîê çà äîïîìîãîþ çì³íè òåõíîëîã³÷íèõ óìîâ âèðîùóâàííÿ.