2019
DOI: 10.3390/atoms7010013
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Influence of Nitrogen Admixture on Plasma Characteristics in a dc Argon Glow Discharge and in Afterglow

Abstract: The present paper is based on the materials of the Invited Lecture presented at 29th Summer School and International Symposium on the Physics of Ionized Gases (28 August 2018–1 September 2018, Belgrade, Serbia). In the paper, the effect of nitrogen admixture on various characteristics of a dc glow discharge in argon (the volt-ampere characteristic, rate of plasma decay in the afterglow, discharge constriction condition, and formation of a partially constricted discharge) is considered.

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Cited by 16 publications
(4 citation statements)
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“…Gas discharge plasma in Ar/N 2 mixtures is rather well understood [33][34][35]. However, which of the possible reactions and reaction pathways, including electron impact ionisation, dissociative ionisation, vibrational excitation, and vibrational pumping, to name only few, are dominant depends strongly on the total gas pressure, mixture and excitation mechanisms.…”
Section: Deposition Environmentmentioning
confidence: 99%
“…Gas discharge plasma in Ar/N 2 mixtures is rather well understood [33][34][35]. However, which of the possible reactions and reaction pathways, including electron impact ionisation, dissociative ionisation, vibrational excitation, and vibrational pumping, to name only few, are dominant depends strongly on the total gas pressure, mixture and excitation mechanisms.…”
Section: Deposition Environmentmentioning
confidence: 99%
“…), gas laser manufacturing, and large-area flat-panel plasma screens. Besides, there are other essential applications in microelectronics industries [2]. Other important applications are the surface treatments of materials, which include surface etching for the manufacture of integrated circuits, plasma polymerization, polymer curing, and coating deposition [3].…”
Section: Introductionmentioning
confidence: 99%
“…By contrast, some reactive gases, such as oxygen, nitrogen, or air can be mixed in small quantities into the background of noble gas for the production of chemically active species, such as O 3 , OH, H 2 O 2 , NO, and OH radicals at low temperatures with a reduction in the breakdown voltage [ 23 , 24 ]. In a plasma generated from a gas mixture, the excited noble gas can ionize the reactive gas by energy transfer (Penning ionization) via collision, resulting in a change in the discharge characteristics [ 25 ].…”
Section: Introductionmentioning
confidence: 99%