Influence of multi-pulse action on the evolution of silicon microrelief under femtosecond laser irradiation

Guk, I. V.; Кузьмин, Е. В.; Shandybina, G. D.; Yakovlev, E. B.; Dyukin, R. V.; Kulagin, V. S.

doi:10.1364/jot.84.000462

J. Opt. Technol.

2017

DOI: 10.1364/jot.84.000462

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Influence of multi-pulse action on the evolution of silicon microrelief under femtosecond laser irradiation

I. V. Guk

Е. В. Кузьмин

G. D. Shandybina

et al.

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Influence of multi-pulse action on the evolution of silicon microrelief under femtosecond laser irradiation

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