1987
DOI: 10.1063/1.98721
|View full text |Cite
|
Sign up to set email alerts
|

Influence of microstructure on the Urbach edge of amorphous SiC:H and amorphous SiGe:H alloys

Abstract: Infrared measurements have been used as a means of quantifying the amount of hydrogenated amorphous silicon and amorphous silicon alloy microstructure. Using a parameter obtained from these infrared measurements, the Urbach edge of amorphous silicon (a-Si:H), amorphous silicon carbon (a-SiC:H), and amorphous silicon germanium (a-SiGe:H) obtained from photothermal deflection spectroscopy measurements fall on the same curve. This suggests that the decreasing steepness of the Urbach edge, observed to occur with i… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

1
17
0

Year Published

1990
1990
2012
2012

Publication Types

Select...
7

Relationship

2
5

Authors

Journals

citations
Cited by 65 publications
(18 citation statements)
references
References 19 publications
1
17
0
Order By: Relevance
“…[31] Since films containing more C H also contain more clustered H, the X-ray beam increasingly samples these clustered H complexes, and the broader XRD FWHM's for these films indicates that the spatial regions of NMR clustered H are less well ordered on a medium range scale. For the extensively investigated a-SiC:H system, deposited using silane and methane gas mixtures, [27,28] the valence band tail was observed to broaden with increasing (larger vacancy-type) microvoid densities (decreased structural order), [41] a trend consistent with the theoretical calculations for vacancy incorporation into a-Si.…”
Section: Resultssupporting
confidence: 69%
“…[31] Since films containing more C H also contain more clustered H, the X-ray beam increasingly samples these clustered H complexes, and the broader XRD FWHM's for these films indicates that the spatial regions of NMR clustered H are less well ordered on a medium range scale. For the extensively investigated a-SiC:H system, deposited using silane and methane gas mixtures, [27,28] the valence band tail was observed to broaden with increasing (larger vacancy-type) microvoid densities (decreased structural order), [41] a trend consistent with the theoretical calculations for vacancy incorporation into a-Si.…”
Section: Resultssupporting
confidence: 69%
“…In previous publications E 0 , obtained by photothermal deflection spectroscopy ͑PDS͒, was plotted for a variety of amorphous systems (a-Si:H, a-SiC:H, a-SiGe:H) versus not only the infrared microstructure fraction parameter R*, but also the density deficiency ͑from flotation density measurements͒ as well as the SAXS microvoid volume fraction V f . [35][36][37][38] It is noted that these investigations covered a range of V f 's ͑and E 0 's͒ much larger than that for the present films. Although the methodology used in those publications to obtain the E 0 values has since been greatly improved ͑i.e., the CPM technique yields significantly narrower E 0 s when both CPM and PDS measurements are made on the same device quality a-Si:H films͒, 39 the trends were nevertheless clear in that both plots yielded an increase in E 0 for all samples with an increase in microstructure measured either by infrared ͑IR͒, flotation, or SAXS.…”
Section: Discussionmentioning
confidence: 77%
“…As this particular behavior is so widely observed, it would appear that the origin of this effect is depending on a single universal mechanism. In spite of past extensive experimental [20][21][22][23][24][25] and theoretical [26][27][28][29][30][31][32][33][34][35][36][37] investigations, the microscopic origin of the absorption tail continues to be a matter of research. In crystalline lattices U-M tails originate from: (i) a temperature induced disorder reflecting the thermal occupancy of phonon states [20,26], (ii) temperature independent static structural disorder associated with impurities, dislocations, stacking faults, etc.…”
Section: Resultsmentioning
confidence: 99%