Abstract:Through ArF immersion lithography a road towards increased optical resolution at the 193nm wavelength has been opened. According to recently proposed roadmaps, ArF immersion lithography will be used for 65nm and 45nm technology nodes. Consequently, keeping the same 4x optical demagnification factor, the dimensions on mask scale down to wavelength values when entering these nodes. Moreover CD control becomes tighter and approaches values of 2-3nm. At such conditions, topography on mask, its type and materials c… Show more
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