Influence of low-intensive beta-irradiation on phase transformations in silicon at microindentation

Abstract

Raman spectroscopy is used to investigate the morphology of silicon phase composition in the indenter imprint with spatial resolution of ~200 nm. Suppression of the efficiency of Si-XII, Si-III, and a-Si phase formation induced by beta-particle irradiation from a 90 Sr + 90 Y source (fluence F = 3.6⋅10 10 cm -2 ) is revealed.