2021
DOI: 10.1002/sia.6997
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Influence of interfacial density on tribological performance of VN/TiN multilayers

Abstract: A study of VN/TiN multilayers grown by direct current magnetron sputtering is presented. The systems are produced by maintaining a constant thickness of 500 nm and using three, four, or five bilayers. The coatings are initially characterized using X-ray diffraction. We observe the formation of TiN and VN phases and obtain values of the texture and stress developed during their growth. The chemical composition of the coatings is analyzed using X-ray photoelectron spectroscopy. A morphological analysis is carrie… Show more

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