Influence of in situ photoexcitation on the structure of a damaged layer in SOI

Щербачев, Д.; Бублик, Т.; Воронова, И.

doi:10.17073/1609-3577-2012-3-68-71

Izv. vysš. učebn. zaved., Mater. èlektron. teh.

2015

DOI: 10.17073/1609-3577-2012-3-68-71

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Influence of in situ photoexcitation on the structure of a damaged layer in SOI

Д. Щербачев¹,

Т. Бублик²,

И. Воронова³

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Influence of in situ photoexcitation on the structure of a damaged layer in SOI

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References 6 publications

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