2011
DOI: 10.1134/s1063782611020230
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Influence of hydrogen on local phase separation in InGaN thin layers and properties of light-emitting structures based on them

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Cited by 9 publications
(5 citation statements)
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“…(b), the growth temperature for the 12‐stacked InGaN layer of the GSL was decreased with a step of 10 °C from 925 to 805 °C, leading to a gradual increase of In composition from 1 to 25% as the InGaN layer nears the active MQW region. Immediately after the growth of each of the InGaN layers with thicknesses of ∼2 nm, an H 2 treatment was performed to dissolve the In atoms in half of the InGaN layer, giving rise to the formation of a GaN layer in the GSL . The five‐pair InGaN/GaN MQW‐active region was then grown at the temperatures of 925 and 805 °C for the barriers and wells with indium composition of 25%, respectively, followed by the growth of a 200 nm‐thick p‐type GaN layer.…”
Section: Methodsmentioning
confidence: 99%
“…(b), the growth temperature for the 12‐stacked InGaN layer of the GSL was decreased with a step of 10 °C from 925 to 805 °C, leading to a gradual increase of In composition from 1 to 25% as the InGaN layer nears the active MQW region. Immediately after the growth of each of the InGaN layers with thicknesses of ∼2 nm, an H 2 treatment was performed to dissolve the In atoms in half of the InGaN layer, giving rise to the formation of a GaN layer in the GSL . The five‐pair InGaN/GaN MQW‐active region was then grown at the temperatures of 925 and 805 °C for the barriers and wells with indium composition of 25%, respectively, followed by the growth of a 200 nm‐thick p‐type GaN layer.…”
Section: Methodsmentioning
confidence: 99%
“…H 2 and N 2 are used as a carrier gas in different periods of the growth process. Conventionally, the N 2 is used as carrier gas in the process of InGaN layer growth because H 2 has a corrosive effect on InGaN layer which will largely decrease the efficiency of In incorporation [11,12]. However, H 2 as carrier gas can greatly improve the surface mobility of atoms and reduce the impurity concentration.…”
Section: Methodsmentioning
confidence: 99%
“…Admixing of hydrogen during the GI after the deposition of an InGaN QW stimulates phase separation while admixing of hydrogen directly during the growth of an InGaN QW suppresses phase separation. 16,17 In this study, we investigated different approaches to grow InGaN QWs, which are suitable to realize a RBS in the near UV range. The goal of our materials research is a high lateral uniformity of the individual Contributing Editor: Winston Schoenfeld a) QWs and their reproducibility during the growth of a large number of periods.…”
Section: Introductionmentioning
confidence: 99%