2022 International Symposium on Semiconductor Manufacturing (ISSM) 2022
DOI: 10.1109/issm55802.2022.10026911
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Influence of High Temperature N2 Annealing on Photoluminescence of SiC and Si Quantum Dots in SiO2 Layer

Kohki Murakawa
1
,
Norihito Mayama
2
,
Tomohisa Mizuno
3
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