2012
DOI: 10.12693/aphyspola.122.1111
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Influence of Growth Conditions and Doping on Physical Properties of Gallium Antimonide Single Crystals

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Cited by 6 publications
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“…The native acceptor defects V Ga and Ga Sb will be compensated by forming the main ionized acceptors in the structure of V Ga Te Sb , additional acceptor defects in the structure of V Ga Ga Sb V Ga and V Ga Ga Sb Te Sb will also develop as doping level increases. 30,31) The above could be responsible for the transformation of magnitude and distribution of FWHM and residual stress in L1, L2 and L3 wafers as the concentration of Te dopant increases. Thermally-induced stresses in single-crystal substrates will intensify the problems of breakage and wafer warp, deteriorate the properties of the free surfaces used for epitaxial deposition, and modify the electrical and optical properties due to piezoelectric and photoelastic effects.…”
Section: Resultsmentioning
confidence: 99%
“…The native acceptor defects V Ga and Ga Sb will be compensated by forming the main ionized acceptors in the structure of V Ga Te Sb , additional acceptor defects in the structure of V Ga Ga Sb V Ga and V Ga Ga Sb Te Sb will also develop as doping level increases. 30,31) The above could be responsible for the transformation of magnitude and distribution of FWHM and residual stress in L1, L2 and L3 wafers as the concentration of Te dopant increases. Thermally-induced stresses in single-crystal substrates will intensify the problems of breakage and wafer warp, deteriorate the properties of the free surfaces used for epitaxial deposition, and modify the electrical and optical properties due to piezoelectric and photoelastic effects.…”
Section: Resultsmentioning
confidence: 99%