Influence of gas phase composition on the defects formation in lithium niobate

Tsirlin, M.

doi:10.1023/b:jmsc.0000025855.47619.d5

Cited by 8 publications

(4 citation statements)

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“…According to Δ G analysis of Li 2 O, Nb 2 O 5 decomposition reactions show that the oxides decompose and completely dissociate into Li, Nb, and O 2 at temperatures above 2050 K [ 42 ]. At pressure 1 × 10 −2 Torr, (7) becomes impossible, and LiNbO 3 decompose into Li 2 O and Nb 2 O 5 according to (4) [ 43 ]. With the subsequent propagation of laser plume toward the substrate, its temperature decreases, and the conditions for reverse reactions of Li and Nb interaction with O 2 are created, as well as the formation of their oxides and lithium niobate.…”

Section: Resultsmentioning

confidence: 99%

“…In addition, with increasing oxygen pressure in the growth chamber, the character of the plasma interaction in the laser plume changes, which causes phase formation and mass transfer during PLD [46]. A decrease [43]. With the subsequent propagation of laser plume toward the substrate, its temperature decreases, and the conditions for reverse reactions of Li and Nb interaction with O 2 are created, as well as the formation of their oxides and lithium niobate.…”

Section: Resultsmentioning

confidence: 99%

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Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation

et al. 2020

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Energy conversion devices draw much attention due to their effective usage of energy and resulting decrease in CO2 emissions, which slows down the global warming processes. Fabrication of energy conversion devices based on ferroelectric and piezoelectric lead-free films is complicated due to the difficulties associated with insufficient elaboration of growth methods. Most ferroelectric and piezoelectric materials (LiNbO3, BaTiO3, etc.) are multi-component oxides, which significantly complicates their integration with micro- and nanoelectronic technology. This paper reports the effect of the oxygen pressure on the properties of nanocrystalline lithium niobate (LiNbO3) films grown by pulsed laser deposition on SiO2/Si structures. We theoretically investigated the mechanisms of LiNbO3 dissociation at various oxygen pressures. The results of x-ray photoelectron spectroscopy study have shown that conditions for the formation of LiNbO3 films are created only at an oxygen pressure of 1 × 10−2 Torr. At low residual pressure (1 × 10−5 Torr), a lack of oxygen in the formed films leads to the formation of niobium oxide (Nb2O5) clusters. The presented theoretical and experimental results provide an enhanced understanding of the nanocrystalline LiNbO3 films growth with target parameters using pulsed laser deposition for the implementation of piezoelectric and photoelectric energy converters.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation

et al. 2020

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“…This circumstance plays a significant role and, as will become clear from the following, is responsible for the above mentioned specific form of the Ti diffusion frontier. Calculations show [15], that the prevailing component of the gas phase in equilibrium with LN is monoatomic Li (not Li in which G=D/h and h is the mass-transfer coefficient of Li at the solid-gas boundary, which depends on the partial pressure of the volatile component and is determined by (3):…”

Section: Resultsmentioning

confidence: 99%

Some peculiarities of Ti in‐diffusion in lithium niobate

Tsirlin¹,

Dariel²

2007

Cryst. Res. Technol.

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The process of one-and two-dimensional Ti in-diffusion in lithium niobate, LiNbO 3 (LN), single crystals of and orientations at 950-1060°С in oxygen/water vapor medium had been studied. In the case of onedimensional diffusion, a flat diffusion front consisting of Ti solid solution in LN is formed. The process kinetics is described by Fick's equation for the case of a permanent source. In the case of two-dimensional Ti diffusion, the diffusion zone contour acquires the shape close to elliptical. The diffusion rate in the tangential direction is about an order of magnitude higher than in the normal direction. A model qualitatively describing such nontrivial character of the diffusion process is suggested. The model is based on: a) incongruent lithium evaporation out of LN at high temperatures; b) low thermodynamic activity of Li in LiTiO 3 -product of Ti interaction with LN. These factors produce a significant nonlinearity of the process, since a strong chemical bond between Li and Ti in this phase leads to a mutual increase in their diffusive mobility.

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“…Regarding RFMS method, reactive gas composition is a crucial point because formation of complex oxides is very sensitive to the plasma properties. Many authors proposed [15][16][17] use of Ar+O 2 gas mixture as an appropriate reactive gas environment for RFMS process for formation of Si-LiNbO3 heterostructures with quite low interface state density. Nevertheless, despite the influence of this environment on ferroelectric properties, current-voltage (I-V) and capacitance-voltage (C-V) characteristics have been revealed in general, whereas detailed analysis of the interface conditions has not been carried out yet.…”

Section: Introductionmentioning

confidence: 99%

Influence Sputtering Conditions on Electrical Characteristics of Si-LiNbO₃Heterostructures Formed by Radio-Frequency Magnetron Sputtering

Sumets

Иевлев

Kostyuchenko

et al. 2014

Molecular Crystals and Liquid Crystals

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Polycrystalline LiNbO 3 films on (001)Si substrate were grown by radio-frequency magnetron sputtering process at different sputtering conditions. X-ray diffraction analysis showed that films formed in Ar environment (P = 5.0 × 10 −1 Pa) having two-phase composition (LiNbO 3 , LiNb 3 O 8 ) transformed into c-axes-oriented LiNbO 3 films when Ar pressure declined up to P = 1.5 × 10 −1 Pa. This induced an increase in positive oxide charge and coercive field due to formation of defects in the LiNbO 3 layer. Using Ar + O 2 reactive gas mixture led to decline in defect formation (positive oxide charge) and coercive field. Current-voltage and capacitance-voltage analyses demonstrated that barrier properties of the Si-LiNbO 3 heterojunctions are affected by the plasma composition.

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Influence of gas phase composition on the defects formation in lithium niobate

Cited by 8 publications

References 10 publications

Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation

Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation

Some peculiarities of Ti in‐diffusion in lithium niobate

Influence Sputtering Conditions on Electrical Characteristics of Si-LiNbO₃Heterostructures Formed by Radio-Frequency Magnetron Sputtering

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Influence of gas phase composition on the defects formation in lithium niobate

Cited by 8 publications

References 10 publications

Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation

Oxygen Pressure Influence on Properties of Nanocrystalline LiNbO3 Films Grown by Laser Ablation

Some peculiarities of Ti in‐diffusion in lithium niobate

Influence Sputtering Conditions on Electrical Characteristics of Si-LiNbO3Heterostructures Formed by Radio-Frequency Magnetron Sputtering

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Product

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Influence Sputtering Conditions on Electrical Characteristics of Si-LiNbO₃Heterostructures Formed by Radio-Frequency Magnetron Sputtering